Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current
The results of the study of the phase composition and physical and mechanical properties of multicomponent coatings Ti– Cr–B–N formed by magnetron sputtering at a constant current from composite targets are presented. The features of phase formation of coatings when spraying targets containing titan...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2019-04-01
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| Series: | Литьë и металлургия |
| Subjects: | |
| Online Access: | https://lim.bntu.by/jour/article/view/2718 |
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| Summary: | The results of the study of the phase composition and physical and mechanical properties of multicomponent coatings Ti– Cr–B–N formed by magnetron sputtering at a constant current from composite targets are presented. The features of phase formation of coatings when spraying targets containing titanium diboride (TiB2) or boron nitride (BN) as a boron-containing component are studied. The conditions of deposition of coatings with microhardness up to 32 GPA and heat resistance up to 800 °C are established. |
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| ISSN: | 1683-6065 2414-0406 |