Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient
The aerosol deposition (AD) method utilizes high kinetic-energy submicron powders to impact and form a film on a substrate. It is a highly efficient deposition method, capable of producing films or coatings with a strong interfacial bonding and a dense nano-grain structure without thermal assistance...
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2025-02-01
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| author | Long Teng Juan Yang Yongguang Xiao Hongbo Cheng Shibo Gong Gao Luo Jinlin Yang Wenjia Zhang Zhenwei Shen Jun Ouyang |
| author_facet | Long Teng Juan Yang Yongguang Xiao Hongbo Cheng Shibo Gong Gao Luo Jinlin Yang Wenjia Zhang Zhenwei Shen Jun Ouyang |
| author_sort | Long Teng |
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| description | The aerosol deposition (AD) method utilizes high kinetic-energy submicron powders to impact and form a film on a substrate. It is a highly efficient deposition method, capable of producing films or coatings with a strong interfacial bonding and a dense nano-grain structure without thermal assistance. In this work, PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> (PZT53/47) films (~1.2 μm thick) were deposited on Pt/Ti/Si(100) substrates via the AD method. After a conventional annealing process (700 °C for 1 h), these PZT53/47 films displayed a dense, crack-free, nano-grained morphology, corresponding to an optimal electrical performance. A large maximum polarization (<i>P</i><sub>max</sub> = 70 μC/cm<sup>2</sup>) and a small coercive field (<i>E</i><sub>c</sub> = 104 kV/cm) were achieved under the maximum applicable electric field of 1.6 MV/cm. The PZT53/47 films also exhibited a large small-field dielectric constant of ~984, a high tunability of 72%, and a low leakage current of ~3.1 × 10<sup>−5</sup> A/cm<sup>2</sup> @ 40 V. Moreover, the transverse piezoelectric coefficient (<i>e</i><sub>31.f</sub>) of these AD-processed films was as high as −4.6 C/m<sup>2</sup>, comparable to those of sputter-deposited PZT53/47 films. These high-quality PZT53/47 thick films have broad applications in piezoelectric micro-electromechanical systems. |
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| issn | 2073-4352 |
| language | English |
| publishDate | 2025-02-01 |
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| series | Crystals |
| spelling | doaj-art-a5ae915e254e4925a2a3b49cc8b6f05e2025-08-20T03:12:14ZengMDPI AGCrystals2073-43522025-02-0115215910.3390/cryst15020159Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric CoefficientLong Teng0Juan Yang1Yongguang Xiao2Hongbo Cheng3Shibo Gong4Gao Luo5Jinlin Yang6Wenjia Zhang7Zhenwei Shen8Jun Ouyang9Key Laboratory of Key Film Materials & Application for Equipments (Hunan Province), Hunan Provincial Key Laboratory of Thin Film Materials and Devices, School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaKey Laboratory of Key Film Materials & Application for Equipments (Hunan Province), Hunan Provincial Key Laboratory of Thin Film Materials and Devices, School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaKey Laboratory of Key Film Materials & Application for Equipments (Hunan Province), Hunan Provincial Key Laboratory of Thin Film Materials and Devices, School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaKey Laboratory of Key Film Materials & Application for Equipments (Hunan Province), Hunan Provincial Key Laboratory of Thin Film Materials and Devices, School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaKey Laboratory of Key Film Materials & Application for Equipments (Hunan Province), Hunan Provincial Key Laboratory of Thin Film Materials and Devices, School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, ChinaKey Laboratory of Key Film Materials & Application for Equipments (Hunan Province), Hunan Provincial Key Laboratory of Thin Film Materials and Devices, School of Material Sciences and Engineering, Xiangtan University, Xiangtan 411105, ChinaThe aerosol deposition (AD) method utilizes high kinetic-energy submicron powders to impact and form a film on a substrate. It is a highly efficient deposition method, capable of producing films or coatings with a strong interfacial bonding and a dense nano-grain structure without thermal assistance. In this work, PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> (PZT53/47) films (~1.2 μm thick) were deposited on Pt/Ti/Si(100) substrates via the AD method. After a conventional annealing process (700 °C for 1 h), these PZT53/47 films displayed a dense, crack-free, nano-grained morphology, corresponding to an optimal electrical performance. A large maximum polarization (<i>P</i><sub>max</sub> = 70 μC/cm<sup>2</sup>) and a small coercive field (<i>E</i><sub>c</sub> = 104 kV/cm) were achieved under the maximum applicable electric field of 1.6 MV/cm. The PZT53/47 films also exhibited a large small-field dielectric constant of ~984, a high tunability of 72%, and a low leakage current of ~3.1 × 10<sup>−5</sup> A/cm<sup>2</sup> @ 40 V. Moreover, the transverse piezoelectric coefficient (<i>e</i><sub>31.f</sub>) of these AD-processed films was as high as −4.6 C/m<sup>2</sup>, comparable to those of sputter-deposited PZT53/47 films. These high-quality PZT53/47 thick films have broad applications in piezoelectric micro-electromechanical systems.https://www.mdpi.com/2073-4352/15/2/159aerosol depositionPZT53/47 filmtransverse piezoelectric coefficient <i>e</i><sub>31.f</sub> |
| spellingShingle | Long Teng Juan Yang Yongguang Xiao Hongbo Cheng Shibo Gong Gao Luo Jinlin Yang Wenjia Zhang Zhenwei Shen Jun Ouyang Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient Crystals aerosol deposition PZT53/47 film transverse piezoelectric coefficient <i>e</i><sub>31.f</sub> |
| title | Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient |
| title_full | Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient |
| title_fullStr | Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient |
| title_full_unstemmed | Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient |
| title_short | Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient |
| title_sort | aerosol deposited polycrystalline pbzr sub 0 53 sub ti sub 0 47 sub o sub 3 sub thick films with a large transverse piezoelectric coefficient |
| topic | aerosol deposition PZT53/47 film transverse piezoelectric coefficient <i>e</i><sub>31.f</sub> |
| url | https://www.mdpi.com/2073-4352/15/2/159 |
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