A Compensator Microelectromechanical Acceleration Transducer with a Piezoelectric Sensing Element and Optical Reading
Introduction. Modern mobile control objects require the use of highly sensitive transducers of motion parameters, e.g., acceleration, with a wide measurement range. Increased sensitivity to measured parameters can be achieved by using precision optics, e.g., based on the tunneling effect. However, o...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2024-03-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/842 |
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