The influence of interstage channel on efficiency of molecular drag stage in hybrid turbomolecular pump
The interstage channel is one of the factors affecting the efficiency of the molecular drag stage in a hybrid turbomolecular pump (TMP). The influence of parameters of the channel on the pumping performance of the molecular drag stage is investigated. The offered approach allows calculating the pu...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education
2021-10-01
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| Series: | Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение" |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%D0%A2.5,%20%20%E2%84%96%203%20(%D0%90%D0%A0%D0%B8%D0%AD%D0%9C)/45-53%20%D0%A8%D0%BE%D1%81%D1%82%D0%B0%D0%BA%20%D0%AE.%20%D0%90.,%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD%20%D0%9D.%20%D0%9A.,%20%D0%A6%D0%B0%D0%BA%D0%B0%D0%B4%D0%B7%D0%B5%20%D0%93.%20%D0%A2.%20%D1%82.%D0%B4..pdf |
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| Summary: | The interstage channel is one of the factors affecting the efficiency of the molecular drag stage in a hybrid
turbomolecular pump (TMP). The influence of parameters of the channel on the pumping performance
of the molecular drag stage is investigated. The offered approach allows calculating the pumping
performance of a molecular drag stage taking into account the effect of the interstage connecting
channel on the pumping process. The comparison of the pumping characteristics of a molecular drag
stage obtained in calculation taking into account the effect of the channel and excluding it is given. This
article assesses the efficiency of the molecular drag stage in a hybrid TMP depending on geometric and
dynamic parameters of the channel. The outcomes and recommendations allow to expand the range
of working pressures of a hybrid TMP exclusively by means of parameters of the connecting channel. |
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| ISSN: | 2588-0373 2587-764X |