SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells

In this work we prepared double-layer antireflection coatings (DARC) by using the SiO2/SiNx:H heterostructure design. SiO2 thin films were deposited by electron-beam evaporation on the conventional solar cell with SiNx:H single-layer antireflection coatings (SARC), while to avoid the coverage of SiO...

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Main Authors: Minghua Li, Hui Shen, Lin Zhuang, Daming Chen, Xinghua Liang
Format: Article
Language:English
Published: Wiley 2014-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2014/670438
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author Minghua Li
Hui Shen
Lin Zhuang
Daming Chen
Xinghua Liang
author_facet Minghua Li
Hui Shen
Lin Zhuang
Daming Chen
Xinghua Liang
author_sort Minghua Li
collection DOAJ
description In this work we prepared double-layer antireflection coatings (DARC) by using the SiO2/SiNx:H heterostructure design. SiO2 thin films were deposited by electron-beam evaporation on the conventional solar cell with SiNx:H single-layer antireflection coatings (SARC), while to avoid the coverage of SiO2 on the front side busbars, a steel mask was utilized as the shelter. The thickness of the SiNx:H as bottom layer was fixed at 80 nm, and the varied thicknesses of the SiO2 as top layer were 105 nm and 122 nm. The results show that the SiO2/SiNx:H DARC have a much lower reflectance and higher external quantum efficiency (EQE) in short wavelengths compared with the SiNx:H SARC. A higher energy conversion efficiency of 17.80% was obtained for solar cells with SiO2 (105 nm)/SiNx:H (80 nm) DARC, an absolute conversion efficiency increase of 0.32% compared with the conventional single SiNx:H-coated cells.
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issn 1110-662X
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publishDate 2014-01-01
publisher Wiley
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series International Journal of Photoenergy
spelling doaj-art-a2bfee343b3c4a82947d257cec39809d2025-08-20T02:20:37ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2014-01-01201410.1155/2014/670438670438SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar CellsMinghua Li0Hui Shen1Lin Zhuang2Daming Chen3Xinghua Liang4School of Electrical Engineering, Guangdong Mechanical & Electrical College, Guangzhou 510515, ChinaInstitute for Solar Energy Systems, Guangdong Provincial Key Laboratory of Photovoltaic Technologies, State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou 510006, ChinaInstitute for Solar Energy Systems, Guangdong Provincial Key Laboratory of Photovoltaic Technologies, State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou 510006, ChinaInstitute for Solar Energy Systems, Guangdong Provincial Key Laboratory of Photovoltaic Technologies, State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou 510006, ChinaKey Laboratory of Automobile Components and Vehicle Technology in Guangxi, Guangxi University of Science and Technology, Liuzhou 545006, ChinaIn this work we prepared double-layer antireflection coatings (DARC) by using the SiO2/SiNx:H heterostructure design. SiO2 thin films were deposited by electron-beam evaporation on the conventional solar cell with SiNx:H single-layer antireflection coatings (SARC), while to avoid the coverage of SiO2 on the front side busbars, a steel mask was utilized as the shelter. The thickness of the SiNx:H as bottom layer was fixed at 80 nm, and the varied thicknesses of the SiO2 as top layer were 105 nm and 122 nm. The results show that the SiO2/SiNx:H DARC have a much lower reflectance and higher external quantum efficiency (EQE) in short wavelengths compared with the SiNx:H SARC. A higher energy conversion efficiency of 17.80% was obtained for solar cells with SiO2 (105 nm)/SiNx:H (80 nm) DARC, an absolute conversion efficiency increase of 0.32% compared with the conventional single SiNx:H-coated cells.http://dx.doi.org/10.1155/2014/670438
spellingShingle Minghua Li
Hui Shen
Lin Zhuang
Daming Chen
Xinghua Liang
SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells
International Journal of Photoenergy
title SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells
title_full SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells
title_fullStr SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells
title_full_unstemmed SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells
title_short SiO2 Antireflection Coatings Fabricated by Electron-Beam Evaporation for Black Monocrystalline Silicon Solar Cells
title_sort sio2 antireflection coatings fabricated by electron beam evaporation for black monocrystalline silicon solar cells
url http://dx.doi.org/10.1155/2014/670438
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