Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

Piezoelectric micromachined ultrasonic transducers (p-MUTs) have been extensively utilized in medical imaging, range-finding, gesture recognition, and so on. However, the piezoelectric layer is dominated by the toxic Pb(Zr, Ti)O3, other materials possess inferior piezoelectric coefficients, and the...

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Bibliographic Details
Main Authors: Xingxu Zhang, Hao Wu, Yuhui Zhang, Jian Luo, Tao Ye, Kai Tao, Jinjun Deng, Binghe Ma, Weizheng Yuan
Format: Article
Language:English
Published: Elsevier 2025-01-01
Series:Journal of Materiomics
Subjects:
V-doped ZnO
Lead-free
Piezoelectric micromachined ultrasonic transducers
Beam-island structure
Enhanced performance
Online Access:http://www.sciencedirect.com/science/article/pii/S2352847824000431
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