Thermocouple-integrated resonant microcantilever for on-chip thermogravimetric (TG) and differential thermal analysis (DTA) dual characterization applications
Abstract This work presents an integrated microsensor that combines the dual characterization capabilities of thermogravimetric analysis (TGA) and differential thermal analysis (DTA). We integrated two pairs of thermocouples, heating resistors, and resonant drive/detection resistors into a single mi...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-03-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00828-9 |
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