The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror

In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror gener...

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Main Authors: Minqiang Li, Lin Qin, Xiasheng Wang, Jiaojiao Wen, Tong Wu, Xiaoming Huang, Hongbo Yin, Yi Tian, Zhuqing Wang
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Micromachines
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Online Access:https://www.mdpi.com/2072-666X/16/6/640
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author Minqiang Li
Lin Qin
Xiasheng Wang
Jiaojiao Wen
Tong Wu
Xiaoming Huang
Hongbo Yin
Yi Tian
Zhuqing Wang
author_facet Minqiang Li
Lin Qin
Xiasheng Wang
Jiaojiao Wen
Tong Wu
Xiaoming Huang
Hongbo Yin
Yi Tian
Zhuqing Wang
author_sort Minqiang Li
collection DOAJ
description In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology.
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issn 2072-666X
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publishDate 2025-05-01
publisher MDPI AG
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series Micromachines
spelling doaj-art-a156b0437d024d03ad18b2d77db910ef2025-08-20T03:16:23ZengMDPI AGMicromachines2072-666X2025-05-0116664010.3390/mi16060640The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning MirrorMinqiang Li0Lin Qin1Xiasheng Wang2Jiaojiao Wen3Tong Wu4Xiaoming Huang5Hongbo Yin6Yi Tian7Zhuqing Wang8School of Electronic Engineering, Chengdu Technological University, Chengdu 610031, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaSichuan Eye Hospital, Aier Eye Hospital Group, Chengdu 610041, ChinaSichuan Eye Hospital, Aier Eye Hospital Group, Chengdu 610041, ChinaSichuan Eye Hospital, Aier Eye Hospital Group, Chengdu 610041, ChinaDepartment of Wound Repair, The Second Hospital of Hunan University of Chinese Medicine, Changsha 410011, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaIn this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology.https://www.mdpi.com/2072-666X/16/6/640eye-trackingscanning mirrorelectrostatic actuationLissajous scanning
spellingShingle Minqiang Li
Lin Qin
Xiasheng Wang
Jiaojiao Wen
Tong Wu
Xiaoming Huang
Hongbo Yin
Yi Tian
Zhuqing Wang
The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror
Micromachines
eye-tracking
scanning mirror
electrostatic actuation
Lissajous scanning
title The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror
title_full The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror
title_fullStr The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror
title_full_unstemmed The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror
title_short The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror
title_sort design and performance evaluation of an eye tracking system based on an electrostatic mems scanning mirror
topic eye-tracking
scanning mirror
electrostatic actuation
Lissajous scanning
url https://www.mdpi.com/2072-666X/16/6/640
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