The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror
In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror gener...
Saved in:
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/6/640 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849705758936006656 |
|---|---|
| author | Minqiang Li Lin Qin Xiasheng Wang Jiaojiao Wen Tong Wu Xiaoming Huang Hongbo Yin Yi Tian Zhuqing Wang |
| author_facet | Minqiang Li Lin Qin Xiasheng Wang Jiaojiao Wen Tong Wu Xiaoming Huang Hongbo Yin Yi Tian Zhuqing Wang |
| author_sort | Minqiang Li |
| collection | DOAJ |
| description | In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology. |
| format | Article |
| id | doaj-art-a156b0437d024d03ad18b2d77db910ef |
| institution | DOAJ |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-a156b0437d024d03ad18b2d77db910ef2025-08-20T03:16:23ZengMDPI AGMicromachines2072-666X2025-05-0116664010.3390/mi16060640The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning MirrorMinqiang Li0Lin Qin1Xiasheng Wang2Jiaojiao Wen3Tong Wu4Xiaoming Huang5Hongbo Yin6Yi Tian7Zhuqing Wang8School of Electronic Engineering, Chengdu Technological University, Chengdu 610031, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaSichuan Eye Hospital, Aier Eye Hospital Group, Chengdu 610041, ChinaSichuan Eye Hospital, Aier Eye Hospital Group, Chengdu 610041, ChinaSichuan Eye Hospital, Aier Eye Hospital Group, Chengdu 610041, ChinaDepartment of Wound Repair, The Second Hospital of Hunan University of Chinese Medicine, Changsha 410011, ChinaSchool of Mechanical Engineering, Sichuan University, Chengdu 610065, ChinaIn this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology.https://www.mdpi.com/2072-666X/16/6/640eye-trackingscanning mirrorelectrostatic actuationLissajous scanning |
| spellingShingle | Minqiang Li Lin Qin Xiasheng Wang Jiaojiao Wen Tong Wu Xiaoming Huang Hongbo Yin Yi Tian Zhuqing Wang The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror Micromachines eye-tracking scanning mirror electrostatic actuation Lissajous scanning |
| title | The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror |
| title_full | The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror |
| title_fullStr | The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror |
| title_full_unstemmed | The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror |
| title_short | The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror |
| title_sort | design and performance evaluation of an eye tracking system based on an electrostatic mems scanning mirror |
| topic | eye-tracking scanning mirror electrostatic actuation Lissajous scanning |
| url | https://www.mdpi.com/2072-666X/16/6/640 |
| work_keys_str_mv | AT minqiangli thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT linqin thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT xiashengwang thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT jiaojiaowen thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT tongwu thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT xiaominghuang thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT hongboyin thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT yitian thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT zhuqingwang thedesignandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT minqiangli designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT linqin designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT xiashengwang designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT jiaojiaowen designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT tongwu designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT xiaominghuang designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT hongboyin designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT yitian designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror AT zhuqingwang designandperformanceevaluationofaneyetrackingsystembasedonanelectrostaticmemsscanningmirror |