Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °C
Exposure to hazardous gases like NO<sub>x</sub> can have a negative impact on our health. High-performance sensors are needed to control high levels of these contaminants, which, in most cases, are generated by automotive exhaust or industrial factories. In this work we demonstrate NO de...
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MDPI AG
2024-07-01
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/227 |
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| author | José Manuel Carmona-Cejas Teona Mirea Ricardo Hervás Jimena Olivares Marta Clement |
| author_facet | José Manuel Carmona-Cejas Teona Mirea Ricardo Hervás Jimena Olivares Marta Clement |
| author_sort | José Manuel Carmona-Cejas |
| collection | DOAJ |
| description | Exposure to hazardous gases like NO<sub>x</sub> can have a negative impact on our health. High-performance sensors are needed to control high levels of these contaminants, which, in most cases, are generated by automotive exhaust or industrial factories. In this work we demonstrate NO detection below the ppm level by employing an AlScN-based FBAR covered with a sputtered WO<sub>3</sub> active layer. FBARs are potential candidates as they have also proved operation and stability in harsh environments as well as temperature and humidity discrimination with a single sensor. |
| format | Article |
| id | doaj-art-a0daa1d6bc4046729b21c8587de70f35 |
| institution | DOAJ |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-a0daa1d6bc4046729b21c8587de70f352025-08-20T02:56:51ZengMDPI AGProceedings2504-39002024-07-0197122710.3390/proceedings2024097227Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °CJosé Manuel Carmona-Cejas0Teona Mirea1Ricardo Hervás2Jimena Olivares3Marta Clement4CEMDATIC-ETSIT, Universidad Politécnica de Madrid, 28040 Madrid, SpainCEMDATIC-ETSIT, Universidad Politécnica de Madrid, 28040 Madrid, SpainCEMDATIC-ETSIT, Universidad Politécnica de Madrid, 28040 Madrid, SpainCEMDATIC-ETSIT, Universidad Politécnica de Madrid, 28040 Madrid, SpainCEMDATIC-ETSIT, Universidad Politécnica de Madrid, 28040 Madrid, SpainExposure to hazardous gases like NO<sub>x</sub> can have a negative impact on our health. High-performance sensors are needed to control high levels of these contaminants, which, in most cases, are generated by automotive exhaust or industrial factories. In this work we demonstrate NO detection below the ppm level by employing an AlScN-based FBAR covered with a sputtered WO<sub>3</sub> active layer. FBARs are potential candidates as they have also proved operation and stability in harsh environments as well as temperature and humidity discrimination with a single sensor.https://www.mdpi.com/2504-3900/97/1/227FBAR sensorhigh temperaturegas detectionmetal-oxide |
| spellingShingle | José Manuel Carmona-Cejas Teona Mirea Ricardo Hervás Jimena Olivares Marta Clement Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °C Proceedings FBAR sensor high temperature gas detection metal-oxide |
| title | Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °C |
| title_full | Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °C |
| title_fullStr | Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °C |
| title_full_unstemmed | Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °C |
| title_short | Film Bulk Acoustic Resonators for Nitrogen Monoxide Detection at 250 °C |
| title_sort | film bulk acoustic resonators for nitrogen monoxide detection at 250 °c |
| topic | FBAR sensor high temperature gas detection metal-oxide |
| url | https://www.mdpi.com/2504-3900/97/1/227 |
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