ANALYSIS OF LOW VACUUM MICROWAVE DISCHARGE EXCITING CONDITIONS IN RESONATOR TYPE PLASMATRON

ANALYSIS OF LOW VACUUM MICROWAVE DISCHARGE EXCITING CONDITIONS IN RESONATOR TYPE PLASMATRON

The efficiency of a cavity microwave resonator using for getting large volume (more than 4000 cm3) low vacuum plasma for group treatment of products in the microelectronics technology has been evaluated. The results showed that the value of electric field breakdown intensity about E0 ≈ 110 V/cm in a...

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Bibliographic Details
Main Authors: S. I. Madveika, S. V. Bordusau, M. S. Lushakova
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
свч-разряд
плазма
резонатор
волновод
Online Access:https://doklady.bsuir.by/jour/article/view/592
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