Microprobe techniques in SAW measurements

Starting from the conventional microprobe techniques, a scanning acoustic tunneling microscope (SATM) and a scanning acoustic force microscope (SAFM) have been developed to detect particle displacements at solid surfaces up to GHz frequencies. Based on the non-linear dependence of the tunneling curr...

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Bibliographic Details
Main Authors: E. CHILLA, T. HESJEDAL, H.-J, FRÖLICH
Format: Article
Language:English
Published: Institute of Fundamental Technological Research Polish Academy of Sciences 2014-01-01
Series:Archives of Acoustics
Online Access:https://acoustics.ippt.pan.pl/index.php/aa/article/view/990
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Summary:Starting from the conventional microprobe techniques, a scanning acoustic tunneling microscope (SATM) and a scanning acoustic force microscope (SAFM) have been developed to detect particle displacements at solid surfaces up to GHz frequencies. Based on the non-linear dependence of the tunneling current in SATM and of the forces in SAFM on the tip to surface distance, respectively, it is demonstrated that wave field parameters of surface acoustic waves can be measured with a lateral resolution in the submicrometer range.
ISSN:0137-5075
2300-262X