Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design Optimisation
We investigate integrated silicon ring resonators with regard to the influence of design parameters and intra-wafer variations. First, we show the effect of different ring radii and gaps between ring and bus waveguide on optical properties (peak width, finesse, <i>Q</i> factor, and extin...
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MDPI AG
2025-03-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/12/3/234 |
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| author | Daniel Schmid René Eisermann Anna Peczek Georg Winzer Lars Zimmermann Stephan Krenek |
| author_facet | Daniel Schmid René Eisermann Anna Peczek Georg Winzer Lars Zimmermann Stephan Krenek |
| author_sort | Daniel Schmid |
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| description | We investigate integrated silicon ring resonators with regard to the influence of design parameters and intra-wafer variations. First, we show the effect of different ring radii and gaps between ring and bus waveguide on optical properties (peak width, finesse, <i>Q</i> factor, and extinction ratio), from which we calculate the resonators’ coupling and loss coefficients. The dependence on the gap of these properties is discussed at the wafer scale. Second, by incorporating the spectra of 2242 resonators from 59 nominally identical dies on a 200 mm wafer, we show how these properties depend on the resonators’ position on the wafer. Third, we demonstrate how curve fitting of loss and coupling coefficients as a function of the gaps can be used to estimate the optimal gap that realizes critical coupling with a significantly reduced number of manufactured test structures needed to find optimal design parameters. |
| format | Article |
| id | doaj-art-9cb9eabd1d5f4ebe864870fcc70e9736 |
| institution | Kabale University |
| issn | 2304-6732 |
| language | English |
| publishDate | 2025-03-01 |
| publisher | MDPI AG |
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| series | Photonics |
| spelling | doaj-art-9cb9eabd1d5f4ebe864870fcc70e97362025-08-20T03:43:20ZengMDPI AGPhotonics2304-67322025-03-0112323410.3390/photonics12030234Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design OptimisationDaniel Schmid0René Eisermann1Anna Peczek2Georg Winzer3Lars Zimmermann4Stephan Krenek5Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587 Berlin, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587 Berlin, GermanyIHP—Leibniz-Institut Für Innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), GermanyIHP—Leibniz-Institut Für Innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), GermanyIHP—Leibniz-Institut Für Innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), GermanyPhysikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587 Berlin, GermanyWe investigate integrated silicon ring resonators with regard to the influence of design parameters and intra-wafer variations. First, we show the effect of different ring radii and gaps between ring and bus waveguide on optical properties (peak width, finesse, <i>Q</i> factor, and extinction ratio), from which we calculate the resonators’ coupling and loss coefficients. The dependence on the gap of these properties is discussed at the wafer scale. Second, by incorporating the spectra of 2242 resonators from 59 nominally identical dies on a 200 mm wafer, we show how these properties depend on the resonators’ position on the wafer. Third, we demonstrate how curve fitting of loss and coupling coefficients as a function of the gaps can be used to estimate the optimal gap that realizes critical coupling with a significantly reduced number of manufactured test structures needed to find optimal design parameters.https://www.mdpi.com/2304-6732/12/3/234integrated photonicsring resonatormicroringrefractive index sensorintegrated circuit designcoupling |
| spellingShingle | Daniel Schmid René Eisermann Anna Peczek Georg Winzer Lars Zimmermann Stephan Krenek Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design Optimisation Photonics integrated photonics ring resonator microring refractive index sensor integrated circuit design coupling |
| title | Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design Optimisation |
| title_full | Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design Optimisation |
| title_fullStr | Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design Optimisation |
| title_full_unstemmed | Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design Optimisation |
| title_short | Wafer-Scale Experimental Determination of Coupling and Loss for Photonic Integrated Circuit Design Optimisation |
| title_sort | wafer scale experimental determination of coupling and loss for photonic integrated circuit design optimisation |
| topic | integrated photonics ring resonator microring refractive index sensor integrated circuit design coupling |
| url | https://www.mdpi.com/2304-6732/12/3/234 |
| work_keys_str_mv | AT danielschmid waferscaleexperimentaldeterminationofcouplingandlossforphotonicintegratedcircuitdesignoptimisation AT reneeisermann waferscaleexperimentaldeterminationofcouplingandlossforphotonicintegratedcircuitdesignoptimisation AT annapeczek waferscaleexperimentaldeterminationofcouplingandlossforphotonicintegratedcircuitdesignoptimisation AT georgwinzer waferscaleexperimentaldeterminationofcouplingandlossforphotonicintegratedcircuitdesignoptimisation AT larszimmermann waferscaleexperimentaldeterminationofcouplingandlossforphotonicintegratedcircuitdesignoptimisation AT stephankrenek waferscaleexperimentaldeterminationofcouplingandlossforphotonicintegratedcircuitdesignoptimisation |