Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS
We focus on the origin and sources of surface contamination and defects causing the failure of MEMS electrostatic switches. The morphology, and elemental and chemical compositions of the contacting surfaces, conducting paths, and other parts of switches have been characterized by means of SEM, EDXA,...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2015-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2015/679313 |
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