Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties

Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties

In order to investigate the effect of ion magnetron sputtering parameters on the scanning electron microscopy (SEM) images of nonconductive materials with different surface properties， the advantages and limitations of various ion magnetron sputtering conditions， including target material， sputterin...

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Bibliographic Details
Main Author: ZHANG Jie, ZOU Junwen, LIU Xueguang, LI Xiaoying
Format: Article
Language:zho
Published: Editorial Department of Materials Protection 2024-12-01
Series:Cailiao Baohu
Subjects:
scanning electron microscope； ion beam magnetron sputtering； non-conductive materials； surface properties； image
Online Access:http://www.mat-pro.com/fileup/1001-1560/PDF/20241212.pdf
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