CMOS-compatible, AlScN-based integrated electro-optic phase shifter
Commercial production of integrated photonic devices is limited by scalability of desirable material platforms. We explore a relatively new photonic material, AlScN, for its use in electro-optic phase shifting and modulation. Its CMOS-compatibility could facilitate large-scale production of integrat...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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De Gruyter
2024-07-01
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| Series: | Nanophotonics |
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| Online Access: | https://doi.org/10.1515/nanoph-2024-0263 |
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| _version_ | 1850159228092678144 |
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| author | Yoshioka Valerie Jin Jicheng Zhou Haiqi Tang Zichen Olsson III Roy H. Zhen Bo |
| author_facet | Yoshioka Valerie Jin Jicheng Zhou Haiqi Tang Zichen Olsson III Roy H. Zhen Bo |
| author_sort | Yoshioka Valerie |
| collection | DOAJ |
| description | Commercial production of integrated photonic devices is limited by scalability of desirable material platforms. We explore a relatively new photonic material, AlScN, for its use in electro-optic phase shifting and modulation. Its CMOS-compatibility could facilitate large-scale production of integrated photonic modulators, and it exhibits an enhanced second-order optical nonlinearity compared to intrinsic AlN, indicating the possibility for efficient modulation. Here, we measure the electro-optic effect in Al0.80Sc0.20N-based phase shifters. We utilized the TM0 mode, allowing use of the r
33 electro-optic coefficient, and demonstrated V
π
L around 750 V cm. Since the electro-optic response is smaller than expected, we discuss potential causes for the reduced response and future outlook for AlScN-based photonics. |
| format | Article |
| id | doaj-art-9baa7f12cb51423aa0282188966724f9 |
| institution | OA Journals |
| issn | 2192-8614 |
| language | English |
| publishDate | 2024-07-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Nanophotonics |
| spelling | doaj-art-9baa7f12cb51423aa0282188966724f92025-08-20T02:23:36ZengDe GruyterNanophotonics2192-86142024-07-0113183327333510.1515/nanoph-2024-0263CMOS-compatible, AlScN-based integrated electro-optic phase shifterYoshioka Valerie0Jin Jicheng1Zhou Haiqi2Tang Zichen3Olsson III Roy H.4Zhen Bo56572University of Pennsylvania, Philadelphia, PA19104, USA6572University of Pennsylvania, Philadelphia, PA19104, USA6572University of Pennsylvania, Philadelphia, PA19104, USA6572University of Pennsylvania, Philadelphia, PA19104, USA6572University of Pennsylvania, Philadelphia, PA19104, USA6572University of Pennsylvania, Philadelphia, PA19104, USACommercial production of integrated photonic devices is limited by scalability of desirable material platforms. We explore a relatively new photonic material, AlScN, for its use in electro-optic phase shifting and modulation. Its CMOS-compatibility could facilitate large-scale production of integrated photonic modulators, and it exhibits an enhanced second-order optical nonlinearity compared to intrinsic AlN, indicating the possibility for efficient modulation. Here, we measure the electro-optic effect in Al0.80Sc0.20N-based phase shifters. We utilized the TM0 mode, allowing use of the r 33 electro-optic coefficient, and demonstrated V π L around 750 V cm. Since the electro-optic response is smaller than expected, we discuss potential causes for the reduced response and future outlook for AlScN-based photonics.https://doi.org/10.1515/nanoph-2024-0263electro-optic phase shifterintegrated photonicsphotonic materials |
| spellingShingle | Yoshioka Valerie Jin Jicheng Zhou Haiqi Tang Zichen Olsson III Roy H. Zhen Bo CMOS-compatible, AlScN-based integrated electro-optic phase shifter Nanophotonics electro-optic phase shifter integrated photonics photonic materials |
| title | CMOS-compatible, AlScN-based integrated electro-optic phase shifter |
| title_full | CMOS-compatible, AlScN-based integrated electro-optic phase shifter |
| title_fullStr | CMOS-compatible, AlScN-based integrated electro-optic phase shifter |
| title_full_unstemmed | CMOS-compatible, AlScN-based integrated electro-optic phase shifter |
| title_short | CMOS-compatible, AlScN-based integrated electro-optic phase shifter |
| title_sort | cmos compatible alscn based integrated electro optic phase shifter |
| topic | electro-optic phase shifter integrated photonics photonic materials |
| url | https://doi.org/10.1515/nanoph-2024-0263 |
| work_keys_str_mv | AT yoshiokavalerie cmoscompatiblealscnbasedintegratedelectroopticphaseshifter AT jinjicheng cmoscompatiblealscnbasedintegratedelectroopticphaseshifter AT zhouhaiqi cmoscompatiblealscnbasedintegratedelectroopticphaseshifter AT tangzichen cmoscompatiblealscnbasedintegratedelectroopticphaseshifter AT olssoniiiroyh cmoscompatiblealscnbasedintegratedelectroopticphaseshifter AT zhenbo cmoscompatiblealscnbasedintegratedelectroopticphaseshifter |