A Novel <i>AlN</i>/<i>Sc</i><sub>0.2</sub><i>Al</i><sub>0.8</sub><i>N</i>-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone

A Novel <i>AlN</i>/<i>Sc</i><sub>0.2</sub><i>Al</i><sub>0.8</sub><i>N</i>-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone

An innovative design of a hydrophone based on a piezoelectric composite film of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>A</mi><mi>l</mi><mi>N</mi><mo>/...

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Bibliographic Details
Main Authors: Fansheng Meng, Chaoshuai Zhang, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang, Licheng Jia
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Micromachines
Subjects:
AlN/ScAlN composite film
hydrophone
sensitivity
piezoelectric
equivalent noise density
Online Access:https://www.mdpi.com/2072-666X/16/4/454
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