A Novel <i>AlN</i>/<i>Sc</i><sub>0.2</sub><i>Al</i><sub>0.8</sub><i>N</i>-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone

A Novel <i>AlN</i>/<i>Sc</i><sub>0.2</sub><i>Al</i><sub>0.8</sub><i>N</i>-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone

An innovative design of a hydrophone based on a piezoelectric composite film of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>A</mi><mi>l</mi><mi>N</mi><mo>/...

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Bibliographic Details
Main Authors: Fansheng Meng, Chaoshuai Zhang, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang, Licheng Jia
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Micromachines
Subjects:
AlN/ScAlN composite film
hydrophone
sensitivity
piezoelectric
equivalent noise density
Online Access:https://www.mdpi.com/2072-666X/16/4/454
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Summary:An innovative design of a hydrophone based on a piezoelectric composite film of <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>A</mi><mi>l</mi><mi>N</mi><mo>/</mo><mi>S</mi><msub><mi>c</mi><mrow><mn>0.2</mn></mrow></msub><mi>A</mi><msub><mi>l</mi><mrow><mn>0.8</mn></mrow></msub><mi>N</mi></mrow></semantics></math></inline-formula> is presented. By designing a non-uniform composite sensitive layer, the dielectric loss and defect density are significantly reduced, while the high-voltage electrical characteristics of scandium-doped aluminum nitride are retained. X-ray diffraction analysis shows that the sensitive films have excellent crystal quality (FWHM is 0.34°). According to the standard underwater acoustic calibration test, the device exhibits full directivity with a minimum deviation of ±0.5 dB at 1 kHz frequency, sound pressure sensitivity of −162.9 dB (re: 1 V/<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>Pa) and equivalent noise density of 46.1 dB (re: 1 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>Pa/<i>√</i>Hz). The experimental results show that the comprehensive performance of the piezoelectric heterostructure hydrophone meets the standard of commercial high-end hydrophones while maintaining mechanical stability, and provides a new solution for underwater acoustic sensing.
ISSN:2072-666X

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