Plasma treatment of MoS2 field-effect transistors using solid-state fluorine source
Plasma treatment using a solid-state fluorine (F) source can mitigate the emission of F-containing gases into the environment. In this study, we investigated the processability of Ar-plasma-mediated F treatment using a polytetrafluoroethylene (PTFE) sheet as the F source. Surface treatment of two-di...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
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| Series: | Nano Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2632-959X/addadb |
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