Studies of structural and optical properties of sputtered SiC thin films
The present study explored the deposition of amorphous silicon carbide (a-SiC) thin films on Si (100) and glass substrates using RF-magnetron sputtering. The sputtering power is changed from 100 to 250 W to study its influence on the characteristics of a-SiC thin films. Raman spectroscopy reveals th...
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| Format: | Article |
| Language: | English |
| Published: |
Engineering Society for Corrosion, Belgrade
2024-06-01
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| Series: | Zaštita Materijala |
| Online Access: | https://www.zastita-materijala.org/index.php/home/article/view/1143 |
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