Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystals

This work explores niobium (Nb) as an n-type dopant in β-Ga2O3 substrates and examines potential defect states formed in single crystals grown using the optical floating zone (OFZ) technique. Crystals with 0.05 and 0.1 mol. % Nb source doping were analyzed, with x-ray diffraction (XRD) confirming a...

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Main Authors: Ananthu Vijayan V L, Christopher A. Dawe, Sai Charan Vanjari, Vladimir P. Markevich, Matthew P. Halsall, Anthony R. Peaker, Moorthy Babu Sridharan, Martin Kuball
Format: Article
Language:English
Published: AIP Publishing LLC 2025-05-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0261436
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author Ananthu Vijayan V L
Christopher A. Dawe
Sai Charan Vanjari
Vladimir P. Markevich
Matthew P. Halsall
Anthony R. Peaker
Moorthy Babu Sridharan
Martin Kuball
author_facet Ananthu Vijayan V L
Christopher A. Dawe
Sai Charan Vanjari
Vladimir P. Markevich
Matthew P. Halsall
Anthony R. Peaker
Moorthy Babu Sridharan
Martin Kuball
author_sort Ananthu Vijayan V L
collection DOAJ
description This work explores niobium (Nb) as an n-type dopant in β-Ga2O3 substrates and examines potential defect states formed in single crystals grown using the optical floating zone (OFZ) technique. Crystals with 0.05 and 0.1 mol. % Nb source doping were analyzed, with x-ray diffraction (XRD) confirming a (100) orientation and full-width half-maximum (FWHM) values of 150 and 170 arc sec, respectively. The Hall measurements at 295 K revealed a free electron concentration of 6.1 × 1017 and 1.2 × 1018 cm−3 for 0.05 and 0.1 mol. % of Nb source doping, respectively. Defect characterization using deep-level transient spectroscopy (DLTS) provided insights into the deep-level defect states in the material, with this study presenting the first comprehensive defect analysis of Nb-doped β-Ga2O3 single crystals using Laplace-DLTS. Conventional-DLTS revealed a prominent deep-level trap E2 with activation energy for electron emission of 0.69 eV, while Laplace-DLTS resolved closely packed defect states within this E2 emission signal, identifying three distinct deep-levels: E2a (0.68 eV), E2b (0.71 eV), and E3 (0.89 eV). These defects are attributed to Fe and Ti impurities originating from the source material, with their presence in the samples confirmed by secondary ion mass spectrometry (SIMS). A surface-related defect (Es) with activation energy for electron emission of 0.28 eV is also identified. These findings highlight the need for ultra-high-purity source materials in improving the electrical properties of melt-grown β-Ga2O3, as doping compensation due to unintentional Fe incorporation from the source material could impact the electrical conductivity of the substrate.
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spelling doaj-art-964b3eb5441a43d5ba1842c3e672d7cd2025-08-20T02:09:58ZengAIP Publishing LLCAPL Materials2166-532X2025-05-01135051121051121-910.1063/5.0261436Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystalsAnanthu Vijayan V L0Christopher A. Dawe1Sai Charan Vanjari2Vladimir P. Markevich3Matthew P. Halsall4Anthony R. Peaker5Moorthy Babu Sridharan6Martin Kuball7Center for Device Thermography and Reliability (CDTR), HH Wills Physics Laboratory, University of Bristol, Bristol, BS8 1TL, United KingdomPhoton Science Institute and Department of Electrical and Electronic Engineering, The University of Manchester, Manchester, M13 9PL, United KingdomCenter for Device Thermography and Reliability (CDTR), HH Wills Physics Laboratory, University of Bristol, Bristol, BS8 1TL, United KingdomPhoton Science Institute and Department of Electrical and Electronic Engineering, The University of Manchester, Manchester, M13 9PL, United KingdomPhoton Science Institute and Department of Electrical and Electronic Engineering, The University of Manchester, Manchester, M13 9PL, United KingdomPhoton Science Institute and Department of Electrical and Electronic Engineering, The University of Manchester, Manchester, M13 9PL, United KingdomCrystal Growth Centre, Anna University, Chennai 600025, IndiaCenter for Device Thermography and Reliability (CDTR), HH Wills Physics Laboratory, University of Bristol, Bristol, BS8 1TL, United KingdomThis work explores niobium (Nb) as an n-type dopant in β-Ga2O3 substrates and examines potential defect states formed in single crystals grown using the optical floating zone (OFZ) technique. Crystals with 0.05 and 0.1 mol. % Nb source doping were analyzed, with x-ray diffraction (XRD) confirming a (100) orientation and full-width half-maximum (FWHM) values of 150 and 170 arc sec, respectively. The Hall measurements at 295 K revealed a free electron concentration of 6.1 × 1017 and 1.2 × 1018 cm−3 for 0.05 and 0.1 mol. % of Nb source doping, respectively. Defect characterization using deep-level transient spectroscopy (DLTS) provided insights into the deep-level defect states in the material, with this study presenting the first comprehensive defect analysis of Nb-doped β-Ga2O3 single crystals using Laplace-DLTS. Conventional-DLTS revealed a prominent deep-level trap E2 with activation energy for electron emission of 0.69 eV, while Laplace-DLTS resolved closely packed defect states within this E2 emission signal, identifying three distinct deep-levels: E2a (0.68 eV), E2b (0.71 eV), and E3 (0.89 eV). These defects are attributed to Fe and Ti impurities originating from the source material, with their presence in the samples confirmed by secondary ion mass spectrometry (SIMS). A surface-related defect (Es) with activation energy for electron emission of 0.28 eV is also identified. These findings highlight the need for ultra-high-purity source materials in improving the electrical properties of melt-grown β-Ga2O3, as doping compensation due to unintentional Fe incorporation from the source material could impact the electrical conductivity of the substrate.http://dx.doi.org/10.1063/5.0261436
spellingShingle Ananthu Vijayan V L
Christopher A. Dawe
Sai Charan Vanjari
Vladimir P. Markevich
Matthew P. Halsall
Anthony R. Peaker
Moorthy Babu Sridharan
Martin Kuball
Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystals
APL Materials
title Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystals
title_full Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystals
title_fullStr Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystals
title_full_unstemmed Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystals
title_short Characterization of deep-level defects in OFZ grown Nb-doped β-Ga2O3 single crystals
title_sort characterization of deep level defects in ofz grown nb doped β ga2o3 single crystals
url http://dx.doi.org/10.1063/5.0261436
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