Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility
We have been developing a new dry-type off-gas treatment system for recycling fluorine from perfluoro compounds present in off-gases from the semiconductor industry. The feature of this system is to adsorb the fluorine compounds in the exhaust gases from the decomposition furnace by using two types...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2012-01-01
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| Series: | International Journal of Chemical Engineering |
| Online Access: | http://dx.doi.org/10.1155/2012/329419 |
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| _version_ | 1832560819004506112 |
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| author | Shinji Yasui Tadashi Shojo Goichi Inoue Kunihiko Koike Akihiro Takeuchi Yoshio Iwasa |
| author_facet | Shinji Yasui Tadashi Shojo Goichi Inoue Kunihiko Koike Akihiro Takeuchi Yoshio Iwasa |
| author_sort | Shinji Yasui |
| collection | DOAJ |
| description | We have been developing a new dry-type off-gas treatment system for recycling fluorine from perfluoro compounds present in off-gases from the semiconductor industry. The feature of this system is to adsorb the fluorine compounds in the exhaust gases from the decomposition furnace by using two types of solid adsorbents: the calcium carbonate in the upper layer adsorbs HF and converts it to CaF2, and the sodium bicarbonate in the lower layer adsorbs HF and SiF4 and converts them to Na2SiF6. This paper describes the fluorine compound adsorption properties of both the solid adsorbents—calcium carbonate and the sodium compound—for the optimal design of the fixation furnace. An analysis of the gas-solid reaction rate was performed from the experimental results of the breakthrough curve by using a fixed-bed reaction model, and the reaction rate constants and adsorption capacity were obtained for achieving an optimal process design. |
| format | Article |
| id | doaj-art-9594c1f03cca4d5ab63806db35587838 |
| institution | Kabale University |
| issn | 1687-806X 1687-8078 |
| language | English |
| publishDate | 2012-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Chemical Engineering |
| spelling | doaj-art-9594c1f03cca4d5ab63806db355878382025-02-03T01:26:37ZengWileyInternational Journal of Chemical Engineering1687-806X1687-80782012-01-01201210.1155/2012/329419329419Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor FacilityShinji Yasui0Tadashi Shojo1Goichi Inoue2Kunihiko Koike3Akihiro Takeuchi4Yoshio Iwasa5Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, JapanIwatani Corporation, 4-5-1 Katsube, Moriyama-shi, Shiga 524-0041, JapanIwatani Corporation, 4-5-1 Katsube, Moriyama-shi, Shiga 524-0041, JapanIwatani Corporation, 4-5-1 Katsube, Moriyama-shi, Shiga 524-0041, JapanChubu Electric Power Co., Inc., 20-1 Kitasekiyama, Odaka-cho, Midori-ku, Nagoya 459-8522, JapanChubu Electric Power Co., Inc., 20-1 Kitasekiyama, Odaka-cho, Midori-ku, Nagoya 459-8522, JapanWe have been developing a new dry-type off-gas treatment system for recycling fluorine from perfluoro compounds present in off-gases from the semiconductor industry. The feature of this system is to adsorb the fluorine compounds in the exhaust gases from the decomposition furnace by using two types of solid adsorbents: the calcium carbonate in the upper layer adsorbs HF and converts it to CaF2, and the sodium bicarbonate in the lower layer adsorbs HF and SiF4 and converts them to Na2SiF6. This paper describes the fluorine compound adsorption properties of both the solid adsorbents—calcium carbonate and the sodium compound—for the optimal design of the fixation furnace. An analysis of the gas-solid reaction rate was performed from the experimental results of the breakthrough curve by using a fixed-bed reaction model, and the reaction rate constants and adsorption capacity were obtained for achieving an optimal process design.http://dx.doi.org/10.1155/2012/329419 |
| spellingShingle | Shinji Yasui Tadashi Shojo Goichi Inoue Kunihiko Koike Akihiro Takeuchi Yoshio Iwasa Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility International Journal of Chemical Engineering |
| title | Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility |
| title_full | Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility |
| title_fullStr | Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility |
| title_full_unstemmed | Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility |
| title_short | Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility |
| title_sort | gas solid reaction properties of fluorine compounds and solid adsorbents for off gas treatment from semiconductor facility |
| url | http://dx.doi.org/10.1155/2012/329419 |
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