Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching
This paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional...
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MDPI AG
2024-12-01
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| author | Qihui Yu Maarten J. S. Bonnema Mahdieh Yariesbouei Remco J. Wiegerink Joost C. Lötters |
| author_facet | Qihui Yu Maarten J. S. Bonnema Mahdieh Yariesbouei Remco J. Wiegerink Joost C. Lötters |
| author_sort | Qihui Yu |
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| description | This paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional area, the sensor has a much higher flow range, up to 50 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi mathvariant="normal">g</mi><mo> </mo><msup><mi mathvariant="normal">h</mi><mrow><mo>−</mo><mn>1</mn></mrow></msup></mrow></semantics></math></inline-formula> (for water) with a pressure drop of 1 bar, compared to the standard SCT-based Coriolis sensor, which is only 1.2 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi mathvariant="normal">g</mi><mo> </mo><msup><mi mathvariant="normal">h</mi><mrow><mo>−</mo><mn>1</mn></mrow></msup></mrow></semantics></math></inline-formula>. The channel has a semi-elliptical cross-sectional area, measuring 200 micrometers wide and 70 micrometers deep. The channel wall is made of a stack of thin films with a total thickness of 2.5 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mo>μ</mo><mi mathvariant="normal">m</mi></mrow></semantics></math></inline-formula>. Water, isopropyl alcohol (IPA), and nitrogen (N<sub>2</sub>) are used to test and evaluate the sensor’s mass flow and density sensing performance. |
| format | Article |
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| institution | OA Journals |
| issn | 1424-8220 |
| language | English |
| publishDate | 2024-12-01 |
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| series | Sensors |
| spelling | doaj-art-93f853ae35a6446a9c6db59bed4c33e12025-08-20T02:01:14ZengMDPI AGSensors1424-82202024-12-012424795210.3390/s24247952Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet EtchingQihui Yu0Maarten J. S. Bonnema1Mahdieh Yariesbouei2Remco J. Wiegerink3Joost C. Lötters4MESA<sup>+</sup> Institute for Nanotechnology, University of Twente, 7522 NH Enschede, The NetherlandsMESA<sup>+</sup> Institute for Nanotechnology, University of Twente, 7522 NH Enschede, The NetherlandsPhilips Medical Systems International B.V., 5684 PC Best, The NetherlandsMESA<sup>+</sup> Institute for Nanotechnology, University of Twente, 7522 NH Enschede, The NetherlandsMESA<sup>+</sup> Institute for Nanotechnology, University of Twente, 7522 NH Enschede, The NetherlandsThis paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional area, the sensor has a much higher flow range, up to 50 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi mathvariant="normal">g</mi><mo> </mo><msup><mi mathvariant="normal">h</mi><mrow><mo>−</mo><mn>1</mn></mrow></msup></mrow></semantics></math></inline-formula> (for water) with a pressure drop of 1 bar, compared to the standard SCT-based Coriolis sensor, which is only 1.2 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi mathvariant="normal">g</mi><mo> </mo><msup><mi mathvariant="normal">h</mi><mrow><mo>−</mo><mn>1</mn></mrow></msup></mrow></semantics></math></inline-formula>. The channel has a semi-elliptical cross-sectional area, measuring 200 micrometers wide and 70 micrometers deep. The channel wall is made of a stack of thin films with a total thickness of 2.5 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mo>μ</mo><mi mathvariant="normal">m</mi></mrow></semantics></math></inline-formula>. Water, isopropyl alcohol (IPA), and nitrogen (N<sub>2</sub>) are used to test and evaluate the sensor’s mass flow and density sensing performance.https://www.mdpi.com/1424-8220/24/24/7952surface channel technologyHNA etchingmicrofluidic channelCoriolis mass flow sensor |
| spellingShingle | Qihui Yu Maarten J. S. Bonnema Mahdieh Yariesbouei Remco J. Wiegerink Joost C. Lötters Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching Sensors surface channel technology HNA etching microfluidic channel Coriolis mass flow sensor |
| title | Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching |
| title_full | Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching |
| title_fullStr | Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching |
| title_full_unstemmed | Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching |
| title_short | Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching |
| title_sort | micro coriolis mass flow sensor with large channel diameter realized by hna wet etching |
| topic | surface channel technology HNA etching microfluidic channel Coriolis mass flow sensor |
| url | https://www.mdpi.com/1424-8220/24/24/7952 |
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