Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement
A novel integrated optical ultrasound sensor based on silicon-on-insulator (SOI) platform is proposed, theoretically analyzed and experimentally demonstrated. By using a selectively etched SOI microring resonator in an add-drop structure, the technique provides a linear and distortion-free sensing r...
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| Format: | Article |
| Language: | English |
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IEEE
2020-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/9026777/ |
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| _version_ | 1849416983419813888 |
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| author | Wenjian Yang Shijie Song Keith Powell Xiaoyi Tian Liwei Li Linh Nguyen Xiaoke Yi |
| author_facet | Wenjian Yang Shijie Song Keith Powell Xiaoyi Tian Liwei Li Linh Nguyen Xiaoke Yi |
| author_sort | Wenjian Yang |
| collection | DOAJ |
| description | A novel integrated optical ultrasound sensor based on silicon-on-insulator (SOI) platform is proposed, theoretically analyzed and experimentally demonstrated. By using a selectively etched SOI microring resonator in an add-drop structure, the technique provides a linear and distortion-free sensing response to the ultrasound signal as it prevents the coupling region deformation and removes variations from the power fluctuation of the optical source. The proof-of-concept experimental demonstration of the proposed sensor shows the detection of air-coupled ultrasound pressure at different frequencies and magnitudes, a frequency sensing resolution of 30 Hz and a wide acceptance angle around 75 degrees. |
| format | Article |
| id | doaj-art-935a811112024e138b20766e51a71041 |
| institution | Kabale University |
| issn | 1943-0655 |
| language | English |
| publishDate | 2020-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-935a811112024e138b20766e51a710412025-08-20T03:32:58ZengIEEEIEEE Photonics Journal1943-06552020-01-011221910.1109/JPHOT.2020.29789479026777Etched Silicon-on-Insulator Microring Resonator for Ultrasound MeasurementWenjian Yang0https://orcid.org/0000-0002-9571-4529Shijie Song1Keith Powell2Xiaoyi Tian3https://orcid.org/0000-0001-5969-0526Liwei Li4https://orcid.org/0000-0002-2887-4979Linh Nguyen5Xiaoke Yi6https://orcid.org/0000-0003-1477-5504Faculty of Engineering and Information Technologies, School of Electrical and Information Engineering, The University of Sydney, Camperdown, NSW, AustraliaFaculty of Engineering and Information Technologies, School of Electrical and Information Engineering, The University of Sydney, Camperdown, NSW, AustraliaFaculty of Engineering and Information Technologies, School of Electrical and Information Engineering, The University of Sydney, Camperdown, NSW, AustraliaFaculty of Engineering and Information Technologies, School of Electrical and Information Engineering, The University of Sydney, Camperdown, NSW, AustraliaFaculty of Engineering and Information Technologies, School of Electrical and Information Engineering, The University of Sydney, Camperdown, NSW, AustraliaFaculty of Engineering and Information Technologies, School of Electrical and Information Engineering, The University of Sydney, Camperdown, NSW, AustraliaFaculty of Engineering and Information Technologies, School of Electrical and Information Engineering, The University of Sydney, Camperdown, NSW, AustraliaA novel integrated optical ultrasound sensor based on silicon-on-insulator (SOI) platform is proposed, theoretically analyzed and experimentally demonstrated. By using a selectively etched SOI microring resonator in an add-drop structure, the technique provides a linear and distortion-free sensing response to the ultrasound signal as it prevents the coupling region deformation and removes variations from the power fluctuation of the optical source. The proof-of-concept experimental demonstration of the proposed sensor shows the detection of air-coupled ultrasound pressure at different frequencies and magnitudes, a frequency sensing resolution of 30 Hz and a wide acceptance angle around 75 degrees.https://ieeexplore.ieee.org/document/9026777/Optical sensorsoptical resonatorsphotonic integrated circuitsintegrated optics devices. |
| spellingShingle | Wenjian Yang Shijie Song Keith Powell Xiaoyi Tian Liwei Li Linh Nguyen Xiaoke Yi Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement IEEE Photonics Journal Optical sensors optical resonators photonic integrated circuits integrated optics devices. |
| title | Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement |
| title_full | Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement |
| title_fullStr | Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement |
| title_full_unstemmed | Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement |
| title_short | Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement |
| title_sort | etched silicon on insulator microring resonator for ultrasound measurement |
| topic | Optical sensors optical resonators photonic integrated circuits integrated optics devices. |
| url | https://ieeexplore.ieee.org/document/9026777/ |
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