On-chip integration of achromatic metalens arrays
Abstract Broadband achromatic metalenses and metalens arrays hold promise for enabling high-performance optical imaging in a compact form factor. Conventional visible-light achromatic metalenses are composed of transparent and high-refractive-index TiO2 or GaN nanopillars, but are strongly limited i...
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2025-08-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-025-62539-7 |
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| author | Yao Zhang Xiong Jiang Geyang Qu Jing Han Chen Li Baichuan Bo Qifeng Ruan Zhengtong Liu Qinghai Song Shumin Xiao |
| author_facet | Yao Zhang Xiong Jiang Geyang Qu Jing Han Chen Li Baichuan Bo Qifeng Ruan Zhengtong Liu Qinghai Song Shumin Xiao |
| author_sort | Yao Zhang |
| collection | DOAJ |
| description | Abstract Broadband achromatic metalenses and metalens arrays hold promise for enabling high-performance optical imaging in a compact form factor. Conventional visible-light achromatic metalenses are composed of transparent and high-refractive-index TiO2 or GaN nanopillars, but are strongly limited in mainstream silicon-based complementary metal-oxide-semiconductor (CMOS) processes. Herein, we report the realization of high-efficiency Si3N4 achromatic metalenses in the visible range and demonstrate their integration onto a commercial imaging chip. By improving nanofabrication techniques, we have dramatically increased the aspect ratio of Si3N4 nanostructures from ~17 to a high value of 43.33. Consequently, the group delay of the Si3N4 nanostructures is significantly increased and the averaged focusing efficiency of a Si3N4 metalens with a numerical aperture of 0.155 reaches 80.39%. Owing to the CMOS-compatibility of Si3N4, such high-quality metalenses have been integrated with commercial imaging sensors and demonstrated the capability of full-color optical imaging. This research paves a critical step towards chip-integrated meta-devices. |
| format | Article |
| id | doaj-art-9345bddf9cff4b39b81f7530b0f3d890 |
| institution | DOAJ |
| issn | 2041-1723 |
| language | English |
| publishDate | 2025-08-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Nature Communications |
| spelling | doaj-art-9345bddf9cff4b39b81f7530b0f3d8902025-08-20T03:05:10ZengNature PortfolioNature Communications2041-17232025-08-011611810.1038/s41467-025-62539-7On-chip integration of achromatic metalens arraysYao Zhang0Xiong Jiang1Geyang Qu2Jing Han3Chen Li4Baichuan Bo5Qifeng Ruan6Zhengtong Liu7Qinghai Song8Shumin Xiao9Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenPengcheng Laboratory, ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenMinistry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology ShenzhenAbstract Broadband achromatic metalenses and metalens arrays hold promise for enabling high-performance optical imaging in a compact form factor. Conventional visible-light achromatic metalenses are composed of transparent and high-refractive-index TiO2 or GaN nanopillars, but are strongly limited in mainstream silicon-based complementary metal-oxide-semiconductor (CMOS) processes. Herein, we report the realization of high-efficiency Si3N4 achromatic metalenses in the visible range and demonstrate their integration onto a commercial imaging chip. By improving nanofabrication techniques, we have dramatically increased the aspect ratio of Si3N4 nanostructures from ~17 to a high value of 43.33. Consequently, the group delay of the Si3N4 nanostructures is significantly increased and the averaged focusing efficiency of a Si3N4 metalens with a numerical aperture of 0.155 reaches 80.39%. Owing to the CMOS-compatibility of Si3N4, such high-quality metalenses have been integrated with commercial imaging sensors and demonstrated the capability of full-color optical imaging. This research paves a critical step towards chip-integrated meta-devices.https://doi.org/10.1038/s41467-025-62539-7 |
| spellingShingle | Yao Zhang Xiong Jiang Geyang Qu Jing Han Chen Li Baichuan Bo Qifeng Ruan Zhengtong Liu Qinghai Song Shumin Xiao On-chip integration of achromatic metalens arrays Nature Communications |
| title | On-chip integration of achromatic metalens arrays |
| title_full | On-chip integration of achromatic metalens arrays |
| title_fullStr | On-chip integration of achromatic metalens arrays |
| title_full_unstemmed | On-chip integration of achromatic metalens arrays |
| title_short | On-chip integration of achromatic metalens arrays |
| title_sort | on chip integration of achromatic metalens arrays |
| url | https://doi.org/10.1038/s41467-025-62539-7 |
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