THE EFFECT OF SURFACTANTS ON SUPERCONFORMAL DEPOSITION OF ELECTROLESS COMPOSITES IN NANOSCALE PATTERNS
Electroless plating of metal composites has been proposed as a promising method for metallization of high aspect ratio trenches for micro- and nanoelectronics and microelectromechanical systems application. Deposition of Ag(W) electroless films was performed from ammoniate silver solution to fill de...
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| Main Author: | |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/692 |
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