A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications

A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications

Low-loss, UV wavelength compatible Al<sub>2</sub>O<sub>3</sub> photonic waveguides have been fabricated in a 200 mm CMOS pilot line. The Al<sub>2</sub>O<sub>3</sub> waveguide layer optical properties and roughness were characterized by ellipsometry and...

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Bibliographic Details
Main Authors: P. Neutens, E. Mafakheri, X. Zheng, P. Helin, Z. Jafari, C. Lin, G. Jeevanandam, Nga P. Pham, S. Fan, C. Su, R. Jansen, P. Van Dorpe, N. Le Thomas, C. Haffner
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Photonics Journal
Subjects:
Photonic waveguide
photonic materials
alumina
ultra-violet
low-loss
CMOS-compatible
Online Access:https://ieeexplore.ieee.org/document/10993371/
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