A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications
Low-loss, UV wavelength compatible Al<sub>2</sub>O<sub>3</sub> photonic waveguides have been fabricated in a 200 mm CMOS pilot line. The Al<sub>2</sub>O<sub>3</sub> waveguide layer optical properties and roughness were characterized by ellipsometry and...
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2025-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/10993371/ |
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| author | P. Neutens E. Mafakheri X. Zheng P. Helin Z. Jafari C. Lin G. Jeevanandam Nga P. Pham S. Fan C. Su R. Jansen P. Van Dorpe N. Le Thomas C. Haffner |
| author_facet | P. Neutens E. Mafakheri X. Zheng P. Helin Z. Jafari C. Lin G. Jeevanandam Nga P. Pham S. Fan C. Su R. Jansen P. Van Dorpe N. Le Thomas C. Haffner |
| author_sort | P. Neutens |
| collection | DOAJ |
| description | Low-loss, UV wavelength compatible Al<sub>2</sub>O<sub>3</sub> photonic waveguides have been fabricated in a 200 mm CMOS pilot line. The Al<sub>2</sub>O<sub>3</sub> waveguide layer optical properties and roughness were characterized by ellipsometry and AFM, respectively. Optical losses of the slab mode in the waveguide layer were studied by prism coupling. SiO<sub>2</sub>-cladded Al<sub>2</sub>O<sub>3</sub> waveguides were patterned on 200 mm wafers and propagation losses were measured at 266, 360, 450, 532 and 638 nm wavelengths. Wafer-level measurements for 360–638 nm show an average propagation loss below 0.6 dB/cm, while die-level measurements for 266 nm yield average propagation losses between 4.3 and 14.7 dB/cm. To study the dependence of the wave propagation on processing variations, large sets of Mach-Zehnder interferometers with varying arm lengths were measured at a wavelength of 360 nm, and the coherence length of the standard 450 nm wide and 110 nm high Al<sub>2</sub>O<sub>3</sub> waveguide was calculated to be longer than 2.2 mm. |
| format | Article |
| id | doaj-art-9161ebeefe744acf80f87eb213d22da4 |
| institution | Kabale University |
| issn | 1943-0655 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-9161ebeefe744acf80f87eb213d22da42025-08-20T03:47:28ZengIEEEIEEE Photonics Journal1943-06552025-01-011731610.1109/JPHOT.2025.356816210993371A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible ApplicationsP. Neutens0https://orcid.org/0000-0002-0620-0033E. Mafakheri1X. Zheng2P. Helin3Z. Jafari4C. Lin5https://orcid.org/0000-0001-9248-9496G. Jeevanandam6Nga P. Pham7S. Fan8C. Su9R. Jansen10https://orcid.org/0000-0001-6685-4699P. Van Dorpe11https://orcid.org/0000-0003-0918-1664N. Le Thomas12https://orcid.org/0000-0003-4797-9642C. Haffner13imec, Leuven, Belgiumimec, Leuven, BelgiumGhent University, Ghent, Belgiumimec, Leuven, Belgiumimec, Leuven, BelgiumGhent University, Ghent, Belgiumimec, Leuven, Belgiumimec, Leuven, BelgiumGhent University, Ghent, BelgiumGhent University, Ghent, Belgiumimec, Leuven, Belgiumimec, Leuven, BelgiumGhent University, Ghent, Belgiumimec, Leuven, BelgiumLow-loss, UV wavelength compatible Al<sub>2</sub>O<sub>3</sub> photonic waveguides have been fabricated in a 200 mm CMOS pilot line. The Al<sub>2</sub>O<sub>3</sub> waveguide layer optical properties and roughness were characterized by ellipsometry and AFM, respectively. Optical losses of the slab mode in the waveguide layer were studied by prism coupling. SiO<sub>2</sub>-cladded Al<sub>2</sub>O<sub>3</sub> waveguides were patterned on 200 mm wafers and propagation losses were measured at 266, 360, 450, 532 and 638 nm wavelengths. Wafer-level measurements for 360–638 nm show an average propagation loss below 0.6 dB/cm, while die-level measurements for 266 nm yield average propagation losses between 4.3 and 14.7 dB/cm. To study the dependence of the wave propagation on processing variations, large sets of Mach-Zehnder interferometers with varying arm lengths were measured at a wavelength of 360 nm, and the coherence length of the standard 450 nm wide and 110 nm high Al<sub>2</sub>O<sub>3</sub> waveguide was calculated to be longer than 2.2 mm.https://ieeexplore.ieee.org/document/10993371/Photonic waveguidephotonic materialsaluminaultra-violetlow-lossCMOS-compatible |
| spellingShingle | P. Neutens E. Mafakheri X. Zheng P. Helin Z. Jafari C. Lin G. Jeevanandam Nga P. Pham S. Fan C. Su R. Jansen P. Van Dorpe N. Le Thomas C. Haffner A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications IEEE Photonics Journal Photonic waveguide photonic materials alumina ultra-violet low-loss CMOS-compatible |
| title | A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications |
| title_full | A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications |
| title_fullStr | A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications |
| title_full_unstemmed | A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications |
| title_short | A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications |
| title_sort | 200 mm wafer scale al sub 2 sub o sub 3 sub photonics waveguide technology for uv and visible applications |
| topic | Photonic waveguide photonic materials alumina ultra-violet low-loss CMOS-compatible |
| url | https://ieeexplore.ieee.org/document/10993371/ |
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