Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor
In this study, we present the design and electromagnetic performance optimization of a micro-electromechanical system (MEMS) miniature outer-rotor permanent magnet motor. With increased attention towards higher torque density and lower torque pulsations in MEMS micromotor designs, an adaptation of a...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-07-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/7/815 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849246568066056192 |
|---|---|
| author | Kaibo Lei Haiwang Li Shijia Li Tiantong Xu |
| author_facet | Kaibo Lei Haiwang Li Shijia Li Tiantong Xu |
| author_sort | Kaibo Lei |
| collection | DOAJ |
| description | In this study, we present the design and electromagnetic performance optimization of a micro-electromechanical system (MEMS) miniature outer-rotor permanent magnet motor. With increased attention towards higher torque density and lower torque pulsations in MEMS micromotor designs, an adaptation of an external rotor can be highly attractive. However, with the design complexity involved in such high-performance MEMS outer-rotor motor designs, the ultra-miniature 3D coil structures and the thin-film topology surrounding the air gap have been one of the main challenges. In this study, an ultra-thin outer-rotor motor with 3D MEMS silicon-based coils and a MEMS-compatible manufacturing method for the 3D coils is presented. Additionally, finite element simulations are conducted for the thin-film topology around the air gap to optimize performance characteristics such as torque developed, torque pulsations, and back electromotive force amplitude. Ultimately, the average magnetic flux density increased by 37.1%, from 0.361 T to 0.495 T. The root mean square (RMS) value of the back EMF per phase rises by 14.4%. Notably, the average torque is improved by 11.3%, while the torque ripple is significantly reduced from 1.281 mNm to 0.74 mNm, corresponding to a reduction of 49.9% in torque ripple percentage. |
| format | Article |
| id | doaj-art-8fe41ddb7a2a4fe693dc2e4fb8650423 |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-8fe41ddb7a2a4fe693dc2e4fb86504232025-08-20T03:58:27ZengMDPI AGMicromachines2072-666X2025-07-0116781510.3390/mi16070815Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet MotorKaibo Lei0Haiwang Li1Shijia Li2Tiantong Xu3National Key Laboratory of Science and Technology on Aero-Engine Aero-Thermodynamics, Beihang University, Beijing 100191, ChinaNational Key Laboratory of Science and Technology on Aero-Engine Aero-Thermodynamics, Beihang University, Beijing 100191, ChinaNational Key Laboratory of Science and Technology on Aero-Engine Aero-Thermodynamics, Beihang University, Beijing 100191, ChinaNational Key Laboratory of Science and Technology on Aero-Engine Aero-Thermodynamics, Beihang University, Beijing 100191, ChinaIn this study, we present the design and electromagnetic performance optimization of a micro-electromechanical system (MEMS) miniature outer-rotor permanent magnet motor. With increased attention towards higher torque density and lower torque pulsations in MEMS micromotor designs, an adaptation of an external rotor can be highly attractive. However, with the design complexity involved in such high-performance MEMS outer-rotor motor designs, the ultra-miniature 3D coil structures and the thin-film topology surrounding the air gap have been one of the main challenges. In this study, an ultra-thin outer-rotor motor with 3D MEMS silicon-based coils and a MEMS-compatible manufacturing method for the 3D coils is presented. Additionally, finite element simulations are conducted for the thin-film topology around the air gap to optimize performance characteristics such as torque developed, torque pulsations, and back electromotive force amplitude. Ultimately, the average magnetic flux density increased by 37.1%, from 0.361 T to 0.495 T. The root mean square (RMS) value of the back EMF per phase rises by 14.4%. Notably, the average torque is improved by 11.3%, while the torque ripple is significantly reduced from 1.281 mNm to 0.74 mNm, corresponding to a reduction of 49.9% in torque ripple percentage.https://www.mdpi.com/2072-666X/16/7/815MEMS motorouter-rotor permanent magnet motorelectromagnetic performance optimizationback EMFtorquecogging torque |
| spellingShingle | Kaibo Lei Haiwang Li Shijia Li Tiantong Xu Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor Micromachines MEMS motor outer-rotor permanent magnet motor electromagnetic performance optimization back EMF torque cogging torque |
| title | Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor |
| title_full | Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor |
| title_fullStr | Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor |
| title_full_unstemmed | Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor |
| title_short | Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor |
| title_sort | design and electromagnetic performance optimization of a mems miniature outer rotor permanent magnet motor |
| topic | MEMS motor outer-rotor permanent magnet motor electromagnetic performance optimization back EMF torque cogging torque |
| url | https://www.mdpi.com/2072-666X/16/7/815 |
| work_keys_str_mv | AT kaibolei designandelectromagneticperformanceoptimizationofamemsminiatureouterrotorpermanentmagnetmotor AT haiwangli designandelectromagneticperformanceoptimizationofamemsminiatureouterrotorpermanentmagnetmotor AT shijiali designandelectromagneticperformanceoptimizationofamemsminiatureouterrotorpermanentmagnetmotor AT tiantongxu designandelectromagneticperformanceoptimizationofamemsminiatureouterrotorpermanentmagnetmotor |