Development of novel lubricant formulation for cleanroom and vacuum application
Abstract Contamination sensitive applications are processes in various industries that require extremely controlled conditions, and which are conducted in dedicated cleanrooms or in cleanroom-like environments. Process cleanliness and quality can further be enhanced by employment of vacuum, like in...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-05-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-025-97285-9 |
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