Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory
Piezoelectric-actuated machine tools (PAMTs) exhibit nanoscale motion capabilities, with their S-shaped curve trajectory further enabling smooth path execution and reduced terminal pulse. However, the speed changes inherent in multi-order trajectories introduce an additional non-uniform creep differ...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/15/8/4207 |
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