Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory
Piezoelectric-actuated machine tools (PAMTs) exhibit nanoscale motion capabilities, with their S-shaped curve trajectory further enabling smooth path execution and reduced terminal pulse. However, the speed changes inherent in multi-order trajectories introduce an additional non-uniform creep differ...
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MDPI AG
2025-04-01
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| author | Dong An Zicheng Qin Yixiao Yang Xiaoyang Yu Chaofeng Li |
| author_facet | Dong An Zicheng Qin Yixiao Yang Xiaoyang Yu Chaofeng Li |
| author_sort | Dong An |
| collection | DOAJ |
| description | Piezoelectric-actuated machine tools (PAMTs) exhibit nanoscale motion capabilities, with their S-shaped curve trajectory further enabling smooth path execution and reduced terminal pulse. However, the speed changes inherent in multi-order trajectories introduce an additional non-uniform creep difference (NCD), which differs significantly from conventional hysteresis effects. Traditional models are inadequate for addressing this mixed shape nonlinearity. To overcome this limitation, this paper proposes a hybrid compensation method for the S-shaped curve trajectory of piezoelectric-actuated machine tools. The general deformation law is first established through a comprehensive mechanism analysis. The NCD and hysteresis, induced by speed changes and inherent properties, are decoupled and addressed using a pre-known phenomenon model and a clockwise operator model, respectively. Finally, a hybrid feedforward control strategy is developed to integrate these models for effective compensation. Experimental results demonstrate that the hybrid compensation method achieves a maximum relative error of 5.48% and a maximum mean square error of 0.28%, effectively mitigating the dual nonlinear factors arising from the piezoelectric-actuated machine tool’s trajectory in feedforward control. |
| format | Article |
| id | doaj-art-8eb69ecadb0c4d1d83df0bcf50f14915 |
| institution | DOAJ |
| issn | 2076-3417 |
| language | English |
| publishDate | 2025-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj-art-8eb69ecadb0c4d1d83df0bcf50f149152025-08-20T03:14:24ZengMDPI AGApplied Sciences2076-34172025-04-01158420710.3390/app15084207Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve TrajectoryDong An0Zicheng Qin1Yixiao Yang2Xiaoyang Yu3Chaofeng Li4School of Mechanical Engineering, Shenyang Jianzhu University, Shenyang 110168, ChinaSchool of Mechanical Engineering, Shenyang Jianzhu University, Shenyang 110168, ChinaSchool of Microelectronics, Fudan University, Shanghai 200433, ChinaSchool of Microelectronics, Fudan University, Shanghai 200433, ChinaSchool of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, ChinaPiezoelectric-actuated machine tools (PAMTs) exhibit nanoscale motion capabilities, with their S-shaped curve trajectory further enabling smooth path execution and reduced terminal pulse. However, the speed changes inherent in multi-order trajectories introduce an additional non-uniform creep difference (NCD), which differs significantly from conventional hysteresis effects. Traditional models are inadequate for addressing this mixed shape nonlinearity. To overcome this limitation, this paper proposes a hybrid compensation method for the S-shaped curve trajectory of piezoelectric-actuated machine tools. The general deformation law is first established through a comprehensive mechanism analysis. The NCD and hysteresis, induced by speed changes and inherent properties, are decoupled and addressed using a pre-known phenomenon model and a clockwise operator model, respectively. Finally, a hybrid feedforward control strategy is developed to integrate these models for effective compensation. Experimental results demonstrate that the hybrid compensation method achieves a maximum relative error of 5.48% and a maximum mean square error of 0.28%, effectively mitigating the dual nonlinear factors arising from the piezoelectric-actuated machine tool’s trajectory in feedforward control.https://www.mdpi.com/2076-3417/15/8/4207piezoelectric actuatorpiezoelectric-actuated machine tools (PAMTs)composite nonlinearitynon-uniform creep difference (NCD)feedforward control |
| spellingShingle | Dong An Zicheng Qin Yixiao Yang Xiaoyang Yu Chaofeng Li Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory Applied Sciences piezoelectric actuator piezoelectric-actuated machine tools (PAMTs) composite nonlinearity non-uniform creep difference (NCD) feedforward control |
| title | Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory |
| title_full | Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory |
| title_fullStr | Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory |
| title_full_unstemmed | Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory |
| title_short | Hybrid Compensation Method for Non-Uniform Creep Difference and Hysteresis Nonlinearity of Piezoelectric-Actuated Machine Tools Under S-Shaped Curve Trajectory |
| title_sort | hybrid compensation method for non uniform creep difference and hysteresis nonlinearity of piezoelectric actuated machine tools under s shaped curve trajectory |
| topic | piezoelectric actuator piezoelectric-actuated machine tools (PAMTs) composite nonlinearity non-uniform creep difference (NCD) feedforward control |
| url | https://www.mdpi.com/2076-3417/15/8/4207 |
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