Optimization and performance study of large aspect ratio SiC microgrooves by waterjet assisted laser machining
Abstract Silicon carbide (SiC) ceramics hold significant application value in high-end fields such as semiconductors and aerospace due to their exceptional mechanical properties and thermal stability. Large-aspect-ratio (LAR) microgrooves in ceramics are crucial for enabling advanced functionalities...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-08-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-14499-7 |
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