Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators
Abstract This paper addresses a critical challenge in the design of MEMS actuators: the rejection of out-of-plane motion, specifically along the Z-axis, which can severely impact the precision and performance of these micro-actuation systems. In many MEMS applications, unwanted out-of-plane displace...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-07-01
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| Series: | Microsystems & Nanoengineering |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41378-025-00971-x |
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