Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators
Abstract This paper addresses a critical challenge in the design of MEMS actuators: the rejection of out-of-plane motion, specifically along the Z-axis, which can severely impact the precision and performance of these micro-actuation systems. In many MEMS applications, unwanted out-of-plane displace...
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2025-07-01
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| Series: | Microsystems & Nanoengineering |
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| Online Access: | https://doi.org/10.1038/s41378-025-00971-x |
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| author | Wei Bian Xiaoguang Zhao Wenshuai Lu Yijun Yang Junjie Zhang Rui You Fei Xing |
| author_facet | Wei Bian Xiaoguang Zhao Wenshuai Lu Yijun Yang Junjie Zhang Rui You Fei Xing |
| author_sort | Wei Bian |
| collection | DOAJ |
| description | Abstract This paper addresses a critical challenge in the design of MEMS actuators: the rejection of out-of-plane motion, specifically along the Z-axis, which can severely impact the precision and performance of these micro-actuation systems. In many MEMS applications, unwanted out-of-plane displacement can lead to reduced accuracy in tasks such as optical steering, micro-manipulation, and scanning applications. In response to these limitations, this paper proposes a novel design technique that effectively rejects Z-axis motion by transforming the motion of the micro stage along the Z-axis into equivalent displacements between pairs of points on cantilevers. These point pairs are founded exhibiting variable common-mode and differential-mode motion characteristics, depending on whether the stage is undergoing in-plane (X/Y) or out-of-plane (Z) displacements. By connecting these point pairs with rods, differential motion between the points in the pairs is suppressed, reducing unwanted out-of-plane motion significantly. We provide a detailed analysis of this design methodology and present a practical application in the form of an electromagnetic large displacement MEMS actuator. This actuator undergoes a complete design-simulation-manufacturing-testing cycle, where the effectiveness of the Z-axis motion rejection structure is systematically evaluated, and compared against traditional designs. Experimental results reveal a significant improvement in performance, with static and dynamic travel ranges reaching ±60 μm and ±400 μm, respectively. Moreover, the Z-axis stiffness was enhanced by 68.5%, which is more than five times the improvement observed in the X/Y axes’ stiffness. These results highlight the potential of the proposed method to provide a robust solution for out-of-plane motion suppression in MEMS actuators, offering improved performance without compromising other critical parameters such as displacement and actuation speed. |
| format | Article |
| id | doaj-art-8c9db7e1feff49f5a115bbfe5ff59df2 |
| institution | Kabale University |
| issn | 2055-7434 |
| language | English |
| publishDate | 2025-07-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj-art-8c9db7e1feff49f5a115bbfe5ff59df22025-08-20T03:46:03ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-07-0111111710.1038/s41378-025-00971-xDesign method for out-of-plane motion rejecting structure in 2-DoF large stroke actuatorsWei Bian0Xiaoguang Zhao1Wenshuai Lu2Yijun Yang3Junjie Zhang4Rui You5Fei Xing6Qiyuan LabQiyuan LabQiyuan LabQiyuan LabQiyuan LabQiyuan LabQiyuan LabAbstract This paper addresses a critical challenge in the design of MEMS actuators: the rejection of out-of-plane motion, specifically along the Z-axis, which can severely impact the precision and performance of these micro-actuation systems. In many MEMS applications, unwanted out-of-plane displacement can lead to reduced accuracy in tasks such as optical steering, micro-manipulation, and scanning applications. In response to these limitations, this paper proposes a novel design technique that effectively rejects Z-axis motion by transforming the motion of the micro stage along the Z-axis into equivalent displacements between pairs of points on cantilevers. These point pairs are founded exhibiting variable common-mode and differential-mode motion characteristics, depending on whether the stage is undergoing in-plane (X/Y) or out-of-plane (Z) displacements. By connecting these point pairs with rods, differential motion between the points in the pairs is suppressed, reducing unwanted out-of-plane motion significantly. We provide a detailed analysis of this design methodology and present a practical application in the form of an electromagnetic large displacement MEMS actuator. This actuator undergoes a complete design-simulation-manufacturing-testing cycle, where the effectiveness of the Z-axis motion rejection structure is systematically evaluated, and compared against traditional designs. Experimental results reveal a significant improvement in performance, with static and dynamic travel ranges reaching ±60 μm and ±400 μm, respectively. Moreover, the Z-axis stiffness was enhanced by 68.5%, which is more than five times the improvement observed in the X/Y axes’ stiffness. These results highlight the potential of the proposed method to provide a robust solution for out-of-plane motion suppression in MEMS actuators, offering improved performance without compromising other critical parameters such as displacement and actuation speed.https://doi.org/10.1038/s41378-025-00971-xMEMSActuatorsUnwanted Motion RejectingLarge StrokeElectromagnetic |
| spellingShingle | Wei Bian Xiaoguang Zhao Wenshuai Lu Yijun Yang Junjie Zhang Rui You Fei Xing Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators Microsystems & Nanoengineering MEMS Actuators Unwanted Motion Rejecting Large Stroke Electromagnetic |
| title | Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators |
| title_full | Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators |
| title_fullStr | Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators |
| title_full_unstemmed | Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators |
| title_short | Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators |
| title_sort | design method for out of plane motion rejecting structure in 2 dof large stroke actuators |
| topic | MEMS Actuators Unwanted Motion Rejecting Large Stroke Electromagnetic |
| url | https://doi.org/10.1038/s41378-025-00971-x |
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