In–situ strain control in epitaxial silicon carbide compound semiconductor
Abstract Residual strain in an epilayer grown on a foreign wafer induces epiwafer’s bow, that is often considered undesirable. Wafer bow however, can be advantageous because both the direction and magnitude of strain are vital for the fabrication of various Micro Electro Mechanical Systems (MEMS), s...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2024-12-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-024-80810-7 |
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