Design, Analysis, and Simulation of a MEMS Tuning Fork Gyroscope with a Mechanical Amplification Structure
This paper describes a novel micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) design that employs a chevron-shaped displacement mechanism to amplify the displacement generated by the Coriolis force, thereby increasing the TFG’s mechanical sensitivity. This approach was evaluated us...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/2/195 |
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