Structural and Phase Transformations in Water-Vapour-Plasma-Treated Hydrophilic TiO2 Films

Structural and Phase Transformations in Water-Vapour-Plasma-Treated Hydrophilic TiO2 Films

We have investigated structural and phase transformations in water-vapor-plasma-treated 200–300 nm thick Ti films, maintained at room temperature, by injecting water vapor into radio frequency (RF) plasma at different processing powers. Scanning electron microscopy (SEM) combined with optical micros...

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Bibliographic Details
Main Authors:	L. Pranevicius, M. Urbonavicius, S. Tuckute, K. Gedvilas, T. Rajackas, L. L. Pranevicius, D. Milcius
Format:	Article
Language:	English
Published:	Wiley 2012-01-01
Series:	Advances in Materials Science and Engineering
Online Access:	http://dx.doi.org/10.1155/2012/592485
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