The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon Films
The effect of laser annealing on the surface microrelief and optical properties of nanocrystalline silicon films, prepared by low pressure chemical vapor deposition, has been investigated. It is shown that under the interaction with the laser radiation recrystallization takes place in the films, due...
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| Format: | Article |
| Language: | English |
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Sumy State University
2015-03-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01033.pdf |
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| author | T.V. Rodionova A.S. Sutyagina A.G. Gumenyuk L.Y. Robur |
| author_facet | T.V. Rodionova A.S. Sutyagina A.G. Gumenyuk L.Y. Robur |
| author_sort | T.V. Rodionova |
| collection | DOAJ |
| description | The effect of laser annealing on the surface microrelief and optical properties of nanocrystalline silicon films, prepared by low pressure chemical vapor deposition, has been investigated. It is shown that under the interaction with the laser radiation recrystallization takes place in the films, due to which there is a smoothing of surface irregularities and forming of grain-agglomerates. These structural changes lead to the decrease in the content of the silicon oxide films by reducing the area of the grain boundaries. The additional peak at 480 nm is observed in the absorption spectrum of the films. |
| format | Article |
| id | doaj-art-892db2510fef4b4a81cb8f6067790ffd |
| institution | DOAJ |
| issn | 2077-6772 |
| language | English |
| publishDate | 2015-03-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-892db2510fef4b4a81cb8f6067790ffd2025-08-20T03:07:11ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722015-03-017101033-101033-5The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon FilmsT.V. Rodionova0A.S. Sutyagina1A.G. Gumenyuk2L.Y. Robur3Taras Shevchenko National University of Kyiv, 64/13, Volodymyrska Str., 01601 Kyiv, UkraineTaras Shevchenko National University of Kyiv, 64/13, Volodymyrska Str., 01601 Kyiv, UkraineTaras Shevchenko National University of Kyiv, 64/13, Volodymyrska Str., 01601 Kyiv, UkraineTaras Shevchenko National University of Kyiv, 64/13, Volodymyrska Str., 01601 Kyiv, UkraineThe effect of laser annealing on the surface microrelief and optical properties of nanocrystalline silicon films, prepared by low pressure chemical vapor deposition, has been investigated. It is shown that under the interaction with the laser radiation recrystallization takes place in the films, due to which there is a smoothing of surface irregularities and forming of grain-agglomerates. These structural changes lead to the decrease in the content of the silicon oxide films by reducing the area of the grain boundaries. The additional peak at 480 nm is observed in the absorption spectrum of the films.http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01033.pdfNanocrystalline silicon filmsSurface roughnessGrain growthLaser annealingOptical propertie |
| spellingShingle | T.V. Rodionova A.S. Sutyagina A.G. Gumenyuk L.Y. Robur The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon Films Журнал нано- та електронної фізики Nanocrystalline silicon films Surface roughness Grain growth Laser annealing Optical propertie |
| title | The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon Films |
| title_full | The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon Films |
| title_fullStr | The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon Films |
| title_full_unstemmed | The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon Films |
| title_short | The Effect of Laser Annealing on the Surface Morphology and Optical Characteristics of Nanosilicon Films |
| title_sort | effect of laser annealing on the surface morphology and optical characteristics of nanosilicon films |
| topic | Nanocrystalline silicon films Surface roughness Grain growth Laser annealing Optical propertie |
| url | http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01033.pdf |
| work_keys_str_mv | AT tvrodionova theeffectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms AT assutyagina theeffectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms AT aggumenyuk theeffectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms AT lyrobur theeffectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms AT tvrodionova effectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms AT assutyagina effectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms AT aggumenyuk effectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms AT lyrobur effectoflaserannealingonthesurfacemorphologyandopticalcharacteristicsofnanosiliconfilms |