Yield Diagnosis and Tuning for Emerging Semiconductors During Research Stage
The process of taking a new semiconductor device from the lab to the factory involves a lot of time, funds and manpower, a large portion of which is spent on device yield improvement. In recent years new methods have been tried to rapidly improve yields and using machine learning (ML) algorithms is...
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| Main Authors: | Chunshan Wang, Zizhao Ma, Yuxuan Zhu, Chensheng Jin, Dongyu Chen, Chuxin Zhang, Yining Chen, Wenzhong Bao, Yufeng Xie |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10975036/ |
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