Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering
This paper describes a method for fabricating silicon heterojunction thin film solar cells with an ITO/p-type a-Si : H/n-type c-Si structure by radiofrequency magnetron sputtering. A short-circuit current density and efficiency of 28.80 mA/cm2 and 8.67% were achieved. Novel nanopatterned silicon waf...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2014-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/2014/707543 |
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| author | Shao-Ze Tseng Chang-Rong Lin Hung-Sen Wei Chia-Hua Chan Sheng-Hui Chen |
| author_facet | Shao-Ze Tseng Chang-Rong Lin Hung-Sen Wei Chia-Hua Chan Sheng-Hui Chen |
| author_sort | Shao-Ze Tseng |
| collection | DOAJ |
| description | This paper describes a method for fabricating silicon heterojunction thin film solar cells with an ITO/p-type a-Si : H/n-type c-Si structure by radiofrequency magnetron sputtering. A short-circuit current density and efficiency of 28.80 mA/cm2 and 8.67% were achieved. Novel nanopatterned silicon wafers for use in cells are presented. Improved heterojunction cells are formed on a nanopatterned silicon substrate that is prepared with a self-assembled monolayer of SiO2 nanospheres with a diameter of 550 nm used as an etching mask. The efficiency of the nanopattern silicon substrate heterojunction cells was 31.49% greater than that of heterojunction cells on a flat silicon wafer. |
| format | Article |
| id | doaj-art-8623267016524d08a1b0a15747b0f15f |
| institution | Kabale University |
| issn | 1110-662X 1687-529X |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Photoenergy |
| spelling | doaj-art-8623267016524d08a1b0a15747b0f15f2025-02-03T05:59:17ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2014-01-01201410.1155/2014/707543707543Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron SputteringShao-Ze Tseng0Chang-Rong Lin1Hung-Sen Wei2Chia-Hua Chan3Sheng-Hui Chen4Department of Optics and Photonics, National Central University, 300 Chung-Da Road, Chungli 32001, TaiwanGraduate Institute of Energy Engineering, National Central University, 300 Chung-Da Road, Chungli 32001, TaiwanDepartment of Optics and Photonics, National Central University, 300 Chung-Da Road, Chungli 32001, TaiwanGraduate Institute of Energy Engineering, National Central University, 300 Chung-Da Road, Chungli 32001, TaiwanDepartment of Optics and Photonics, National Central University, 300 Chung-Da Road, Chungli 32001, TaiwanThis paper describes a method for fabricating silicon heterojunction thin film solar cells with an ITO/p-type a-Si : H/n-type c-Si structure by radiofrequency magnetron sputtering. A short-circuit current density and efficiency of 28.80 mA/cm2 and 8.67% were achieved. Novel nanopatterned silicon wafers for use in cells are presented. Improved heterojunction cells are formed on a nanopatterned silicon substrate that is prepared with a self-assembled monolayer of SiO2 nanospheres with a diameter of 550 nm used as an etching mask. The efficiency of the nanopattern silicon substrate heterojunction cells was 31.49% greater than that of heterojunction cells on a flat silicon wafer.http://dx.doi.org/10.1155/2014/707543 |
| spellingShingle | Shao-Ze Tseng Chang-Rong Lin Hung-Sen Wei Chia-Hua Chan Sheng-Hui Chen Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering International Journal of Photoenergy |
| title | Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering |
| title_full | Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering |
| title_fullStr | Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering |
| title_full_unstemmed | Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering |
| title_short | Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering |
| title_sort | nanopatterned silicon substrate use in heterojunction thin film solar cells made by magnetron sputtering |
| url | http://dx.doi.org/10.1155/2014/707543 |
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