Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range
Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers...
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| Format: | Article |
| Language: | English |
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Wiley
2011-01-01
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| Series: | International Journal of Optics |
| Online Access: | http://dx.doi.org/10.1155/2011/902158 |
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| author | Shinan Qian |
| author_facet | Shinan Qian |
| author_sort | Shinan Qian |
| collection | DOAJ |
| description | Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of ∼1 μrad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results. |
| format | Article |
| id | doaj-art-85f1622f202444bcbf2da99bdbfbab49 |
| institution | OA Journals |
| issn | 1687-9384 1687-9392 |
| language | English |
| publishDate | 2011-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Optics |
| spelling | doaj-art-85f1622f202444bcbf2da99bdbfbab492025-08-20T02:08:55ZengWileyInternational Journal of Optics1687-93841687-93922011-01-01201110.1155/2011/902158902158Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing RangeShinan Qian0Instrumentation Division, Brookhaven National Laboratory, Upton, NY 11973, USANanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of ∼1 μrad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.http://dx.doi.org/10.1155/2011/902158 |
| spellingShingle | Shinan Qian Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range International Journal of Optics |
| title | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range |
| title_full | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range |
| title_fullStr | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range |
| title_full_unstemmed | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range |
| title_short | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range |
| title_sort | scanning optical head with nontilted reference beam assuring nanoradian accuracy for a new generation surface profiler in the large slope testing range |
| url | http://dx.doi.org/10.1155/2011/902158 |
| work_keys_str_mv | AT shinanqian scanningopticalheadwithnontiltedreferencebeamassuringnanoradianaccuracyforanewgenerationsurfaceprofilerinthelargeslopetestingrange |