Design and Analysis of High-Precision Workbench with Large Stroke and Heavy Load for Fabricating Large-Area Grating

Design and Analysis of High-Precision Workbench with Large Stroke and Heavy Load for Fabricating Large-Area Grating

When scanning beam interference lithography (SBIL) technology is used for grating fabrication, the stroke, bearing capacity, and accuracy of the workbench determine the size and accuracy of the grating. For large-area gratings with dimensions exceeding the meter level, the existing workbench cannot...

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Bibliographic Details
Main Authors: Guangdong Yu, Heshig Bayan, Qi Chen, Hao Chen, Xin He, Xuefeng Yao
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Photonics
Subjects:
large-area grating fabrication
large stroke
heavy load
high precision
Online Access:https://www.mdpi.com/2304-6732/12/5/414
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