On the formation of thermal barrier coatings by magnetron sputtering
The use of magnetron sputtering systems with extended uncooled targets will allow developing industrial import-substituting technologies for the formation of thermal barrier coatings, based on zirconium oxide doped with rare earth metal oxides to solve urgent problems of gas turbine construction. Th...
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Togliatti State University
2024-12-01
|
| Series: | Frontier Materials & Technologies |
| Subjects: | |
| Online Access: | https://vektornaukitech.ru/jour/article/view/992/918 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1850090316406718464 |
|---|---|
| author | Gennady V. Kachalin Konstantin S. Medvedev Aleksey F. Mednikov Olga S. Zilova Aleksandr B. Tkhabisimov Dmitriy I. Ilyukhin Vladislav A. Kasyanenko |
| author_facet | Gennady V. Kachalin Konstantin S. Medvedev Aleksey F. Mednikov Olga S. Zilova Aleksandr B. Tkhabisimov Dmitriy I. Ilyukhin Vladislav A. Kasyanenko |
| author_sort | Gennady V. Kachalin |
| collection | DOAJ |
| description | The use of magnetron sputtering systems with extended uncooled targets will allow developing industrial import-substituting technologies for the formation of thermal barrier coatings, based on zirconium oxide doped with rare earth metal oxides to solve urgent problems of gas turbine construction. This paper presents the results of comparing the technology for producing thermal barrier coatings by magnetron sputtering, with two types of extended targets made of Zr–8%Y alloy – a widely used cooled target and an uncooled extended target, of a magnetron sputtering system developed by the authors. This paper gives a comparison of the results of mass-spectrometric studies of the hysteresis of the oxygen partial pressure inherent in the technology for producing oxide films; the influence of the target type on the coating growth rate; studies of the structure of thermal barrier coatings using the scanning electron microscopy method; and the elemental composition of coatings based on zirconium dioxide partially stabilised with yttrium oxide – YSZ. It has been experimentally found that increasing the temperature of the magnetron sputtering system target, allows decreasing the loop width of the characteristic hysteresis of the oxygen partial pressure dependence on its flow rate by 2 times. The obtained dependencies allowed determining the range of oxygen flow rates at various magnetron discharge powers, at which the work can be performed with stable and sustainable process control, without the risk of falling into hysteresis. The conducted metallographic studies showed a characteristic developed porous dendritic structure of the ceramic layer, which is necessary to reduce the thermal conductivity coefficient of the thermal barrier coating. It has been revealed that the use of an uncooled target allows increasing the deposition rate of the thermal barrier coating by more than 10 times compared to the deposition rate for a cooled target. The obtained results demonstrate the possibility of using the magnetron sputtering technology of an extended uncooled target to form a ceramic layer of thermal barrier coatings. |
| format | Article |
| id | doaj-art-85321c2ea3c34fa0bebb98b5ea89feba |
| institution | DOAJ |
| issn | 2782-4039 2782-6074 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | Togliatti State University |
| record_format | Article |
| series | Frontier Materials & Technologies |
| spelling | doaj-art-85321c2ea3c34fa0bebb98b5ea89feba2025-08-20T02:42:35ZengTogliatti State UniversityFrontier Materials & Technologies2782-40392782-60742024-12-01-4516110.18323/2782-4039-2024-4-70-5On the formation of thermal barrier coatings by magnetron sputteringGennady V. Kachalin0https://orcid.org/0000-0001-9506-862XKonstantin S. Medvedev1https://orcid.org/0000-0003-1667-458XAleksey F. Mednikov2https://orcid.org/0000-0003-4883-7873Olga S. Zilova3https://orcid.org/0000-0002-0410-8188Aleksandr B. Tkhabisimov4https://orcid.org/0000-0001-9544-9086Dmitriy I. Ilyukhin5https://orcid.org/0009-0009-6385-0284Vladislav A. Kasyanenko6https://orcid.org/0009-0000-7510-2106National Research University “Moscow Power Engineering Institute”, Moscow (Russia)National Research University “Moscow Power Engineering Institute”, Moscow (Russia)National Research University “Moscow Power Engineering Institute”, Moscow (Russia)National Research University “Moscow Power Engineering Institute”, Moscow (Russia)National Research University “Moscow Power Engineering Institute”, Moscow (Russia)National Research University “Moscow Power Engineering Institute”, Moscow (Russia)National Research University “Moscow Power Engineering Institute”, Moscow (Russia)The use of magnetron sputtering systems with extended uncooled targets will allow developing industrial import-substituting technologies for the formation of thermal barrier coatings, based on zirconium oxide doped with rare earth metal oxides to solve urgent problems of gas turbine construction. This paper presents the results of comparing the technology for producing thermal barrier coatings by magnetron sputtering, with two types of extended targets made of Zr–8%Y alloy – a widely used cooled target and an uncooled extended target, of a magnetron sputtering system developed by the authors. This paper gives a comparison of the results of mass-spectrometric studies of the hysteresis of the oxygen partial pressure inherent in the technology for producing oxide films; the influence of the target type on the coating growth rate; studies of the structure of thermal barrier coatings using the scanning electron microscopy method; and the elemental composition of coatings based on zirconium dioxide partially stabilised with yttrium oxide – YSZ. It has been experimentally found that increasing the temperature of the magnetron sputtering system target, allows decreasing the loop width of the characteristic hysteresis of the oxygen partial pressure dependence on its flow rate by 2 times. The obtained dependencies allowed determining the range of oxygen flow rates at various magnetron discharge powers, at which the work can be performed with stable and sustainable process control, without the risk of falling into hysteresis. The conducted metallographic studies showed a characteristic developed porous dendritic structure of the ceramic layer, which is necessary to reduce the thermal conductivity coefficient of the thermal barrier coating. It has been revealed that the use of an uncooled target allows increasing the deposition rate of the thermal barrier coating by more than 10 times compared to the deposition rate for a cooled target. The obtained results demonstrate the possibility of using the magnetron sputtering technology of an extended uncooled target to form a ceramic layer of thermal barrier coatings.https://vektornaukitech.ru/jour/article/view/992/918magnetron sputteringuncooled targetthermal barrier coatingshysteresis phenomenacoating deposition rate |
| spellingShingle | Gennady V. Kachalin Konstantin S. Medvedev Aleksey F. Mednikov Olga S. Zilova Aleksandr B. Tkhabisimov Dmitriy I. Ilyukhin Vladislav A. Kasyanenko On the formation of thermal barrier coatings by magnetron sputtering Frontier Materials & Technologies magnetron sputtering uncooled target thermal barrier coatings hysteresis phenomena coating deposition rate |
| title | On the formation of thermal barrier coatings by magnetron sputtering |
| title_full | On the formation of thermal barrier coatings by magnetron sputtering |
| title_fullStr | On the formation of thermal barrier coatings by magnetron sputtering |
| title_full_unstemmed | On the formation of thermal barrier coatings by magnetron sputtering |
| title_short | On the formation of thermal barrier coatings by magnetron sputtering |
| title_sort | on the formation of thermal barrier coatings by magnetron sputtering |
| topic | magnetron sputtering uncooled target thermal barrier coatings hysteresis phenomena coating deposition rate |
| url | https://vektornaukitech.ru/jour/article/view/992/918 |
| work_keys_str_mv | AT gennadyvkachalin ontheformationofthermalbarriercoatingsbymagnetronsputtering AT konstantinsmedvedev ontheformationofthermalbarriercoatingsbymagnetronsputtering AT alekseyfmednikov ontheformationofthermalbarriercoatingsbymagnetronsputtering AT olgaszilova ontheformationofthermalbarriercoatingsbymagnetronsputtering AT aleksandrbtkhabisimov ontheformationofthermalbarriercoatingsbymagnetronsputtering AT dmitriyiilyukhin ontheformationofthermalbarriercoatingsbymagnetronsputtering AT vladislavakasyanenko ontheformationofthermalbarriercoatingsbymagnetronsputtering |