A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator
Abstract Wide-range vacuum sensors (0.1–105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others prov...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-05-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00937-z |
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| _version_ | 1849730887950794752 |
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| author | Jiaxin Qin Wenliang Xia Junbo Wang Deyong Chen Yulan Lu Xiaoye Huo Bo Xie Jian Chen |
| author_facet | Jiaxin Qin Wenliang Xia Junbo Wang Deyong Chen Yulan Lu Xiaoye Huo Bo Xie Jian Chen |
| author_sort | Jiaxin Qin |
| collection | DOAJ |
| description | Abstract Wide-range vacuum sensors (0.1–105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others providing high accuracy within a limited range. This restricts their applicability in advanced technologies. The primary challenge lies in the sensitivity constraints at medium vacuum, the accuracy limitations at low vacuum, and the dependence of gas types. In this study, a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed, which is inherently small volume and independent of gas types. The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator, which operates in two distinct modes. In the range from 0.3 Pa to 103 Pa, it works in mode-localized mode, where amplitude ratio serves as the output to enhance sensitivity and resolution. For pressure ranging from 103 Pa to 105 Pa, it works in traditional resonance mode, with frequency serving as the output to achieve high accuracy. Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors. |
| format | Article |
| id | doaj-art-8447a56d10d040748b37dfd3ff3d6443 |
| institution | DOAJ |
| issn | 2055-7434 |
| language | English |
| publishDate | 2025-05-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj-art-8447a56d10d040748b37dfd3ff3d64432025-08-20T03:08:43ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-05-0111111010.1038/s41378-025-00937-zA novel high-performance wide-range vacuum sensor based on a weak-coupling resonatorJiaxin Qin0Wenliang Xia1Junbo Wang2Deyong Chen3Yulan Lu4Xiaoye Huo5Bo Xie6Jian Chen7Aerospace Information Research Institute, Chinese Academy of SciencesAerospace Information Research Institute, Chinese Academy of SciencesAerospace Information Research Institute, Chinese Academy of SciencesAerospace Information Research Institute, Chinese Academy of SciencesAerospace Information Research Institute, Chinese Academy of SciencesAerospace Information Research Institute, Chinese Academy of SciencesAerospace Information Research Institute, Chinese Academy of SciencesAerospace Information Research Institute, Chinese Academy of SciencesAbstract Wide-range vacuum sensors (0.1–105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others providing high accuracy within a limited range. This restricts their applicability in advanced technologies. The primary challenge lies in the sensitivity constraints at medium vacuum, the accuracy limitations at low vacuum, and the dependence of gas types. In this study, a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed, which is inherently small volume and independent of gas types. The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator, which operates in two distinct modes. In the range from 0.3 Pa to 103 Pa, it works in mode-localized mode, where amplitude ratio serves as the output to enhance sensitivity and resolution. For pressure ranging from 103 Pa to 105 Pa, it works in traditional resonance mode, with frequency serving as the output to achieve high accuracy. Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.https://doi.org/10.1038/s41378-025-00937-z |
| spellingShingle | Jiaxin Qin Wenliang Xia Junbo Wang Deyong Chen Yulan Lu Xiaoye Huo Bo Xie Jian Chen A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator Microsystems & Nanoengineering |
| title | A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator |
| title_full | A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator |
| title_fullStr | A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator |
| title_full_unstemmed | A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator |
| title_short | A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator |
| title_sort | novel high performance wide range vacuum sensor based on a weak coupling resonator |
| url | https://doi.org/10.1038/s41378-025-00937-z |
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