On Some Improvements of Ion Microprobe Mass Analyzer
It has been considered the ion-optical properties and characteristics of ion microprobe analyzer in which the primary ion beam mass separation is realized by the magnetic prism, and the beam spherical capacitor is used in the secondary ion analyzing system as energy analyzer which form parallel ion...
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| Format: | Article |
| Language: | English |
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Sumy State University
2013-10-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2013/3/articles/jnep_2013_V5_03045.pdf |
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| _version_ | 1850215979483660288 |
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| author | O.S. Kuzema P.O. Kuzema |
| author_facet | O.S. Kuzema P.O. Kuzema |
| author_sort | O.S. Kuzema |
| collection | DOAJ |
| description | It has been considered the ion-optical properties and characteristics of ion microprobe analyzer in which the primary ion beam mass separation is realized by the magnetic prism, and the beam spherical capacitor is used in the secondary ion analyzing system as energy analyzer which form parallel ion beam at the mass analyzer inlet. It has allowed to improve the instrument parameters and to scale down its overall dimension. |
| format | Article |
| id | doaj-art-8249666a35e245d6b2239cf29ca07abd |
| institution | OA Journals |
| issn | 2077-6772 |
| language | English |
| publishDate | 2013-10-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-8249666a35e245d6b2239cf29ca07abd2025-08-20T02:08:27ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722013-10-015303045-103045-5On Some Improvements of Ion Microprobe Mass AnalyzerO.S. KuzemaP.O. Kuzema0Sumy National Agrarian University, 160, Kirov Str., 40021 Sumy, UkraineIt has been considered the ion-optical properties and characteristics of ion microprobe analyzer in which the primary ion beam mass separation is realized by the magnetic prism, and the beam spherical capacitor is used in the secondary ion analyzing system as energy analyzer which form parallel ion beam at the mass analyzer inlet. It has allowed to improve the instrument parameters and to scale down its overall dimension.http://jnep.sumdu.edu.ua/download/numbers/2013/3/articles/jnep_2013_V5_03045.pdfIon probeMagnetic prismIon focusingEnergy analyzerMass analyzerElectrostatic lensResolutio |
| spellingShingle | O.S. Kuzema P.O. Kuzema On Some Improvements of Ion Microprobe Mass Analyzer Журнал нано- та електронної фізики Ion probe Magnetic prism Ion focusing Energy analyzer Mass analyzer Electrostatic lens Resolutio |
| title | On Some Improvements of Ion Microprobe Mass Analyzer |
| title_full | On Some Improvements of Ion Microprobe Mass Analyzer |
| title_fullStr | On Some Improvements of Ion Microprobe Mass Analyzer |
| title_full_unstemmed | On Some Improvements of Ion Microprobe Mass Analyzer |
| title_short | On Some Improvements of Ion Microprobe Mass Analyzer |
| title_sort | on some improvements of ion microprobe mass analyzer |
| topic | Ion probe Magnetic prism Ion focusing Energy analyzer Mass analyzer Electrostatic lens Resolutio |
| url | http://jnep.sumdu.edu.ua/download/numbers/2013/3/articles/jnep_2013_V5_03045.pdf |
| work_keys_str_mv | AT oskuzema onsomeimprovementsofionmicroprobemassanalyzer AT pokuzema onsomeimprovementsofionmicroprobemassanalyzer |