On Some Improvements of Ion Microprobe Mass Analyzer
It has been considered the ion-optical properties and characteristics of ion microprobe analyzer in which the primary ion beam mass separation is realized by the magnetic prism, and the beam spherical capacitor is used in the secondary ion analyzing system as energy analyzer which form parallel ion...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2013-10-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2013/3/articles/jnep_2013_V5_03045.pdf |
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| Summary: | It has been considered the ion-optical properties and characteristics of ion microprobe analyzer in which the primary ion beam mass separation is realized by the magnetic prism, and the beam spherical capacitor is used in the secondary ion analyzing system as energy analyzer which form parallel ion beam at the mass analyzer inlet. It has allowed to improve the instrument parameters and to scale down its overall dimension. |
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| ISSN: | 2077-6772 |