MEMS Valves with Molecular Flow Regime Orifices
In this work, a novel, silicon-based micro-electromechanical valve that includes a submicrometric orifice and can operate at pressure gradients of 1 bar was used to enhance sampling for gas chromatograph mass spectrometers. The valve is based on a membrane-in-membrane design and operates with thermo...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-03-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/73 |
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