MEMS Valves with Molecular Flow Regime Orifices
In this work, a novel, silicon-based micro-electromechanical valve that includes a submicrometric orifice and can operate at pressure gradients of 1 bar was used to enhance sampling for gas chromatograph mass spectrometers. The valve is based on a membrane-in-membrane design and operates with thermo...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-03-01
|
| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/73 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|