Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping Review

The passing of the CHIPS and Science Act in the United States has signaled a renewed interest in expanding the domestic semiconductor industry. To fuel this expansion and the new job opportunities it creates, academic institutions and companies alike will need to educate and train a new and growing...

Full description

Saved in:
Bibliographic Details
Main Authors: Dennis R. Parnell, Atayliya N. Irving, Connor S. Smith, Amy G. Buhler, Jeremy A. Magruder Waisome
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/10982218/
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1850136157721985024
author Dennis R. Parnell
Atayliya N. Irving
Connor S. Smith
Amy G. Buhler
Jeremy A. Magruder Waisome
author_facet Dennis R. Parnell
Atayliya N. Irving
Connor S. Smith
Amy G. Buhler
Jeremy A. Magruder Waisome
author_sort Dennis R. Parnell
collection DOAJ
description The passing of the CHIPS and Science Act in the United States has signaled a renewed interest in expanding the domestic semiconductor industry. To fuel this expansion and the new job opportunities it creates, academic institutions and companies alike will need to educate and train a new and growing workforce in the field of semiconductor fabrication. Unfortunately, the ability to provide hands-on learning experiences currently lacks accessibility due to the costs of starting and maintaining a cleanroom. However, extended reality (XR) offers a lower-cost alternative to address this issue. This scoping review seeks to determine the features present in existing XR environments used for semiconductor fabrication process education. Using the framework outlined by Arksey and O’Malley, only five conference articles from an initial pool of 1,116 articles were included in the review. These papers were all published between 2018 and 2023 and only focused on virtual reality devices. Across the five articles, 12 different features were identified. Notable limitations of this work include restricting the scope to six semiconductor fabrication processes, as well as excluding articles that did not specify the XR device used. Overall, the findings show that there has been very little research on the use of XR in the field of semiconductor fabrication education.
format Article
id doaj-art-7ea9fc0602de4959b41e635f70d2e619
institution OA Journals
issn 2169-3536
language English
publishDate 2025-01-01
publisher IEEE
record_format Article
series IEEE Access
spelling doaj-art-7ea9fc0602de4959b41e635f70d2e6192025-08-20T02:31:12ZengIEEEIEEE Access2169-35362025-01-0113805768058610.1109/ACCESS.2025.356660910982218Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping ReviewDennis R. Parnell0https://orcid.org/0000-0002-5659-9601Atayliya N. Irving1https://orcid.org/0009-0006-3644-7455Connor S. Smith2https://orcid.org/0000-0002-0863-6551Amy G. Buhler3https://orcid.org/0000-0002-0511-8273Jeremy A. Magruder Waisome4https://orcid.org/0000-0002-8710-2637Department of Engineering Education, University of Florida, Gainesville, FL, USADepartment of Engineering Education, University of Florida, Gainesville, FL, USAElectrical and Computer Engineering Department, United States Naval Academy, Annapolis, MD, USAMarston Science Library, University of Florida, Gainesville, FL, USADepartment of Engineering Education, University of Florida, Gainesville, FL, USAThe passing of the CHIPS and Science Act in the United States has signaled a renewed interest in expanding the domestic semiconductor industry. To fuel this expansion and the new job opportunities it creates, academic institutions and companies alike will need to educate and train a new and growing workforce in the field of semiconductor fabrication. Unfortunately, the ability to provide hands-on learning experiences currently lacks accessibility due to the costs of starting and maintaining a cleanroom. However, extended reality (XR) offers a lower-cost alternative to address this issue. This scoping review seeks to determine the features present in existing XR environments used for semiconductor fabrication process education. Using the framework outlined by Arksey and O’Malley, only five conference articles from an initial pool of 1,116 articles were included in the review. These papers were all published between 2018 and 2023 and only focused on virtual reality devices. Across the five articles, 12 different features were identified. Notable limitations of this work include restricting the scope to six semiconductor fabrication processes, as well as excluding articles that did not specify the XR device used. Overall, the findings show that there has been very little research on the use of XR in the field of semiconductor fabrication education.https://ieeexplore.ieee.org/document/10982218/Semiconductor manufacturingfabrication process educationextended realityaugmented realitymixed realityvirtual reality
spellingShingle Dennis R. Parnell
Atayliya N. Irving
Connor S. Smith
Amy G. Buhler
Jeremy A. Magruder Waisome
Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping Review
IEEE Access
Semiconductor manufacturing
fabrication process education
extended reality
augmented reality
mixed reality
virtual reality
title Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping Review
title_full Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping Review
title_fullStr Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping Review
title_full_unstemmed Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping Review
title_short Features of Extended Reality Environments in Semiconductor Fabrication Process Education: A Scoping Review
title_sort features of extended reality environments in semiconductor fabrication process education a scoping review
topic Semiconductor manufacturing
fabrication process education
extended reality
augmented reality
mixed reality
virtual reality
url https://ieeexplore.ieee.org/document/10982218/
work_keys_str_mv AT dennisrparnell featuresofextendedrealityenvironmentsinsemiconductorfabricationprocesseducationascopingreview
AT atayliyanirving featuresofextendedrealityenvironmentsinsemiconductorfabricationprocesseducationascopingreview
AT connorssmith featuresofextendedrealityenvironmentsinsemiconductorfabricationprocesseducationascopingreview
AT amygbuhler featuresofextendedrealityenvironmentsinsemiconductorfabricationprocesseducationascopingreview
AT jeremyamagruderwaisome featuresofextendedrealityenvironmentsinsemiconductorfabricationprocesseducationascopingreview