Local piezoelectric properties of perforated ferroelectric barium–strontium titanate films
Objectives. Focused ion beam etching remains one of the most common methods for fabricating 2D photonic crystals and structures based on functional materials. This technique is quite well developed for semiconductors. But at the same time, the change in the properties of ferroelectric materials unde...
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| Format: | Article |
| Language: | Russian |
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MIREA - Russian Technological University
2022-04-01
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| Series: | Российский технологический журнал |
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| Online Access: | https://www.rtj-mirea.ru/jour/article/view/481 |
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